Numerical analysis for conduction mechanism of thin oxide-nitride-oxide films formed on rough poly-Si

1996 ◽  
Vol 17 (2) ◽  
pp. 56-58 ◽  
Author(s):  
N. Matsuo ◽  
H. Fujiwara ◽  
T. Miyoshi ◽  
T. Koyanagi
Keyword(s):  
Numerical Analysis ◽  
Conduction Mechanism ◽  
Oxide Films ◽  
Thin Oxide ◽  
Nitride Oxide

Post-breakdown conduction mechanism of thin oxide films and their aspects

2003 ◽  
Vol 86 (3) ◽  
pp. 21-27
Author(s):  
Kenji Komiya ◽  
Takashi Oka ◽  
Naoki Okada ◽  
Yasuhisa Omura
Keyword(s):  
Conduction Mechanism ◽  
Oxide Films ◽  
Thin Oxide Films ◽  
Thin Oxide

Electron tunneling through thin oxide–nitride–oxide films under electric field concentration

1998 ◽  
Vol 42 (3) ◽  
pp. 441-446 ◽  
Author(s):  
Naoto Matsuo ◽  
Hiroaki Fujiwara ◽  
Tadaki Miyoshi
Keyword(s):  
Electric Field ◽  
Electron Tunneling ◽  
Oxide Films ◽  
Thin Oxide ◽  
Nitride Oxide
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