High-performance polysilicon contacted shallow junctions formed by stacked-amorphous-silicon films

1992 ◽  
Vol 13 (1) ◽  
pp. 23-25 ◽  
Author(s):  
S.L. Wu ◽  
C.-L. Lee ◽  
T.F. Lei
Keyword(s):  
Amorphous Silicon ◽  
High Performance ◽  
Silicon Films ◽  
Shallow Junctions

Lateral Grain Growth of Amorphous Silicon Films With Wide Thickness Range by Blue Laser Annealing and Application to High Performance Poly-Si TFTs

2016 ◽  
Vol 37 (3) ◽  
pp. 291-294 ◽  
Author(s):  
Seonghyun Jin ◽  
Younwoo Choe ◽  
Suhui Lee ◽  
Tae-Woong Kim ◽  
Mallory Mativenga ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Grain Growth ◽  
High Performance ◽  
Laser Annealing ◽  
Blue Laser ◽  
Silicon Films

Comparative study of large grains and high-performance TFTs in low-temperature crystallized LPCVD and APCVD amorphous silicon films

1994 ◽  
Vol 237 (1-2) ◽  
pp. 255-267 ◽  
Author(s):  
O.S. Panwar ◽  
R.A. Moore ◽  
S.H. Raza ◽  
H.S. Gamble ◽  
B.M. Armstrong
Keyword(s):  
Low Temperature ◽  
Comparative Study ◽  
Amorphous Silicon ◽  
High Performance ◽  
Silicon Films

HYDROGEN PROFILING IN GAS PHASE DOPED AND ION IMPLANTED AMORPHOUS SILICON FILMS

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-779-C4-782 ◽  
Author(s):  
F. J. Demond ◽  
G. Müller ◽  
H. Damjantschitsch ◽  
H. Mannsperger ◽  
S. Kalbitzer ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Gas Phase ◽  
Silicon Films ◽  
Ion Implanted

Structural, Optical, and Electrical Properties of Amorphous Silicon Films

1970 ◽  
Vol 1 (6) ◽  
pp. 2632-2641 ◽  
Author(s):  
M. H. Brodsky ◽  
R. S. Title ◽  
K. Weiser ◽  
G. D. Pettit
Keyword(s):  
Electrical Properties ◽  
Amorphous Silicon ◽  
Silicon Films ◽  
Optical And Electrical Properties
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