Spatial frequency doubling lithography (SFDL) of periodic structures for integrated optical circuit technology
1989 ◽
Vol 7
(9)
◽
pp. 1386-1393
◽
Keyword(s):
2018 ◽
Vol 26
(4)
◽
pp. 264-273
◽
Keyword(s):
1998 ◽
Vol 64
(1)
◽
pp. 75-78