Low-loss single-mode GaAs/AlGaAs miniature optical waveguides with straight and bending structures

1989 ◽  
Vol 7 (7) ◽  
pp. 1044-1054 ◽  
Author(s):  
H. Takeuchi ◽  
K. Oe
Author(s):  
Yoshie Morimoto ◽  
Makoto Hikita ◽  
Hitomi Matsui ◽  
Yuto Fujihara ◽  
Takaaki Ishigure

1999 ◽  
Author(s):  
Robert Blomquist ◽  
Louay A. Eldada ◽  
Michael J. McFarland ◽  
Robert A. Norwood ◽  
Constantina Poga ◽  
...  

2015 ◽  
Vol 2015 (1) ◽  
pp. 000603-000608 ◽  
Author(s):  
Bruce Chou ◽  
William Vis ◽  
Ryuta Furuya ◽  
Venky Sundaram ◽  
Tummala Rao

This paper presents the modeling, design, fabrication, and characterization of ultra-low loss 3D optical waveguides integrated on a glass photonic substrate. A novel, single-step process was developed using moving mask lithography to fabricate a single mode optical waveguide with a built-in turning mirror capable of making 40° or 45° turns for vertical grating couplers or photodetectors, respectively. Planar alignment of the waveguide to fiber interfaces enable passive alignment, contributing to system cost reduction. An optical path with 1.1 dB loss from fiber to die was obtained from optical modeling, while the fabrication of single mode waveguides with built-in mirrors at <1° angular control was demonstrated.


1991 ◽  
Vol 70 (9) ◽  
pp. 5136-5137 ◽  
Author(s):  
R. Lai ◽  
J. Pamulapati ◽  
P. K. Bhattacharya ◽  
R. J. Baird

2016 ◽  
Vol 13 (2) ◽  
pp. 51-57 ◽  
Author(s):  
Bruce Chou ◽  
William Vis ◽  
Ryuta Furuya ◽  
Venky Sundaram ◽  
Rao Tummala

This article presents the modeling, design, fabrication, and characterization of ultra-low loss 3-D optical waveguides integrated on a glass photonic substrate. A novel, single-step process was developed using moving-mask lithography to fabricate a single-mode optical waveguide with a built-in turning mirror capable of achieving 40° or 45° turns for vertical grating couplers or photodetectors, respectively. Planar alignment of the waveguide to fiber interfaces enable passive alignment of the fibers, contributing to system cost reduction. An optical path with 0.81 dB loss from fiber to die was obtained from optical modeling, while the fabrication of single-mode waveguides with built-in total internal reflecting mirrors at <0.2 μm uniformity and <1° angular control was demonstrated.


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