Polymeric optical waveguide films for short-distance optical interconnects

1999 ◽  
Vol 5 (5) ◽  
pp. 1237-1242 ◽  
Author(s):  
M. Hikita ◽  
S. Tomaru ◽  
K. Enbutsu ◽  
N. Ooba ◽  
R. Yoshida ◽  
...  
2000 ◽  
Author(s):  
Fabien Mieyeville ◽  
Gilles Jacquemod ◽  
Ian O'Connor ◽  
Frederic Gaffiot

1999 ◽  
Vol 597 ◽  
Author(s):  
S. Ponoth ◽  
N. Agarwal ◽  
X. Huang ◽  
P. D. Persans ◽  
J. Plawsky

AbstractOptical communications are becoming technologically important on progressively shorter length scales. As computer chip speeds increase longer metal wire interconnects become problematic and may limit device performance. Wide bandwidth optical interconnects may be used to address this problem. Silicon oxide and silicon nitride were explored as prospective optical and processing materials in the making of optical interconnects. Etching of slopes, which would be an important process for making optical interconnects, was studied. Slopes with angles ranging from 5 to 50 degrees were fabricated using a silicon oxide / silicon nitride stack.


2012 ◽  
Vol 23 (1) ◽  
pp. 12-16
Author(s):  
Jong-Bae An ◽  
Woo-Jin Lee ◽  
Sung-Hwan Hwang ◽  
Gye-Won Kim ◽  
Myoung-Jin Kim ◽  
...  

2012 ◽  
Vol 1438 ◽  
Author(s):  
Xinyuan Dou ◽  
Xiaolong Wang ◽  
Xiaohui Lin ◽  
Ray T. Chen

Abstract:In this paper, we studied the optimization of preparation for polymeric optical waveguide based bus structures with embedded 45 degree micro-mirrors by metallic hard mold method. The 45º facets on the metallic hard mold, which were used to create the 45 degree micro-mirrors, were studied by the atomic force microscopy (AFM). The surface roughness of the 45 degree facets was reduced from 70nm to be 2nm by a photopolymer coating step. High speed test on the waveguide shows the low loss and high Q-factor performance of the waveguide structures. A backplane bus with 10 Gbits/sec channel will be reported.


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