Optimization of the driving circuit for material processing with a pulsed-glow discharge

2000 ◽  
Vol 28 (3) ◽  
pp. 1035-1042 ◽  
Author(s):  
O.E. Martinez ◽  
N. Mingolo ◽  
Y. Cesa
2011 ◽  
Vol 66 (14) ◽  
pp. 1411-1416 ◽  
Author(s):  
A. A. Ganeev ◽  
A. R. Gubal’ ◽  
V. I. Mosichev ◽  
N. V. Pershin ◽  
S. N. Petrov ◽  
...  

2017 ◽  
Vol 32 (10) ◽  
pp. 1862-1867 ◽  
Author(s):  
Marco Evertz ◽  
Timo Schwieters ◽  
Markus Börner ◽  
Martin Winter ◽  
Sascha Nowak

A glow discharge-sector field-mass spectrometry (GD-SF-MS) method using matrix-matched self-prepared carbonaceous standards for elemental battery degradation products of (NCM111) electrodes was developed.


1991 ◽  
Vol 219 ◽  
Author(s):  
Y. S. Tsuo ◽  
Y. Xu ◽  
E. A. Ramsay ◽  
R. S. Crandall ◽  
S. J. Salomon ◽  
...  

ABSTRACTWe have studied methods of improving glow-discharge-deposited a-Si1−x Gex :H alloys deposited using silane and germane gas mixtures. Material processing methods studied include (1) varying the substrate temperature from 170° to 280°C, (2) varying the process gas composition and pressure, (3) dilution of the feed gas by hydrogen, argon, or helium, (4) enhancing etching during deposition by adding small amounts of XeF2 vapor into the process gas, and (5) postdeposition annealing and/or hydrogenation.


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