Monte Carlo model for the argon ions and fast argon atoms in a radio-frequency discharge
1999 ◽
Vol 27
(5)
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pp. 1406-1415
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Keyword(s):
Keyword(s):
1999 ◽
Vol 54
(9)
◽
pp. 1335-1350
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Keyword(s):
Keyword(s):
2003 ◽
Vol 8
(1)
◽
pp. 47
2010 ◽
Vol 2
(6)
◽
pp. 549-560
◽
Keyword(s):
High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
◽
2014 ◽
Vol 18
(1-2)
◽
pp. 111-117
1985 ◽
Vol 8
(7)
◽
pp. 364-365
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