Normal current density effect in RF-discharge according to results of two-dimensional numerical modeling
1999 ◽
Vol 27
(3)
◽
pp. 701-706
◽
Keyword(s):
Keyword(s):
1927 ◽
Vol 3
(14)
◽
pp. 306-330
Keyword(s):
1969 ◽
Vol 26
(2)
◽
pp. 127-136
◽
2002 ◽
Keyword(s):
2010 ◽
Vol 61
(1)
◽
pp. 95-105
◽
2011 ◽
Vol 471
(21-22)
◽
pp. 1036-1040
◽