Numerical analysis of surface wave excitation in a planar-type nonmagnetized plasma processing device
1999 ◽
Vol 27
(1)
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pp. 164-170
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2000 ◽
Vol 120
(5)
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pp. 583-588
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2014 ◽
Vol 73
(16)
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pp. 1443-1455
2006 ◽
Vol 65
(3)
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pp. 195-206
1996 ◽
Vol 143
(4)
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pp. 335
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2003 ◽
Vol 18
(6)
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pp. 582-588
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