Mo-Re superconducting thin films by single target magnetron sputtering

1989 ◽  
Vol 25 (2) ◽  
pp. 1972-1975 ◽  
Author(s):  
A. Andreone ◽  
A. Barone ◽  
A. Di Chiara ◽  
G. Mascolo ◽  
V. Palmieri ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
Single Target

Superconducting Thin Films of Bi-Pb-Sr-Ca-Cu-O by dc Magnetron Sputtering from a Single Target

1988 ◽  
Vol 27 (Part 2, No. 11) ◽  
pp. L2091-L2093 ◽  
Author(s):  
Yoshinori Hakuraku ◽  
Yoshinari Aridome ◽  
Tetsuya Ogushi
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering ◽  
Single Target

Initial Studies on The Heteroepitaxial Growth of Thin Films of (AI/In)N on Ain-Seeded (00.1) Sapphire by Single-Target Reactive Magnetron Sputtering

1992 ◽  
Vol 263 ◽  
Author(s):  
T. J. Kistenmacher ◽  
S. A. Ecelberger ◽  
W. A. Bryden
Keyword(s):  
Thin Films ◽  
Chemical Composition ◽  
Magnetron Sputtering ◽  
Electrical Transport ◽  
Growth Parameters ◽  
Heteroepitaxial Growth ◽  
X Ray ◽  
X Ray Scattering ◽  
Single Target ◽  
A Cell

ABSTRACTThin films of (AI/In)N alloys have been deposited on AIN-nucleated (00.1) sapphire by reactive (pure N2 gas) magnetron sputtering and characterized by X-ray scattering, stylus profilometry, optical spectroscopy, and electrical transport measurements. Initial efforts have concentrated on producing films with compositions near Al0.31In0.69N (bandgap tailored to GaN). The alloy sputtering targets were disks fabricated by cold pressing appropriate molar mixtures of beads of 99.99% purity Al and In. The resulting thin films are composed of heteroepitaxial grains {(00.1)InNll(00.1)sapphire; (10.0)InNll(11.0)Sapphire} and their chemical composition has been deduced from the variation in the a cell constant (as measured by the X-ray precession method) to yield equilibrium film compositions near Al0.04In0.96N and Al0.25In0.75N, respectively. Preliminary results are presented on the dependence of the quality of heteroepitaxial growth and electrical and optical properties of. these AlxIn1−xN alloy films on various growth parameters: such as chemical composition; film thickness; morphology; and substrate temperature.

In situ superconducting Y−Ba−Cu−O thin films by single-target r.f. magnetron sputtering

1991 ◽  
Vol 13 (4) ◽  
pp. 477-483
Author(s):  
A. Andreone ◽  
A. Barone ◽  
A. Di Chiara ◽  
F. Miletto Granozio ◽  
G. Peluso ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Single Target

Influence of desorption on the composition of high-temperature superconducting thin films during magnetron sputtering

1998 ◽  
Vol 24 (12) ◽  
pp. 952-953
Author(s):  
A. K. Vorob’ev ◽  
S. V. Gaponov ◽  
M. N. Drozdov ◽  
E. B. Klyuenkov ◽  
V. I. Luchin ◽  
...  
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
High Temperature Superconducting

scholarly journals Preparation of Bi-based Superconducting Thin Films by RF Magnetron Sputtering under Magnetic Field

Shinku ◽  
2004 ◽  
Vol 47 (3) ◽  
pp. 194-196
Author(s):  
Naoki FUJIWARA ◽  
Takahiro ONISHI ◽  
Kouji KATSURAHARA ◽  
Satoru KISHIDA
Keyword(s):  
Magnetic Field ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Superconducting Thin Films
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