Breakdown voltage enhancement for devices on thin silicon layer/silicon dioxide film

1991 ◽  
Vol 38 (7) ◽  
pp. 1650-1654 ◽  
Author(s):  
A. Nakagawa ◽  
N. Yasuhara ◽  
Y. Baba
Keyword(s):  
Silicon Dioxide ◽  
Breakdown Voltage ◽  
Silicon Layer ◽  
Silicon Dioxide Film ◽  
Thin Silicon ◽  
Dioxide Film

Delta layer formation of silver nanoparticles in thin silicon dioxide film by negative ion implantation

2005 ◽  
Vol 196 (1-3) ◽  
pp. 39-43 ◽  
Author(s):  
Hiroshi Tsuji ◽  
Nobutoshi Arai ◽  
Takuya Matsumoto ◽  
Kazuya Ueno ◽  
Kouichiro Adachi ◽  
...  
Keyword(s):  
Silver Nanoparticles ◽  
Ion Implantation ◽  
Silicon Dioxide ◽  
Negative Ion ◽  
Layer Formation ◽  
Silicon Dioxide Film ◽  
Thin Silicon ◽  
Delta Layer ◽  
Dioxide Film

scholarly journals Generation of High-purity Ozone Beam and Its Application to the Formation of Ultra-thin Silicon Dioxide Film.

Hyomen Kagaku ◽  
1997 ◽  
Vol 18 (12) ◽  
pp. 766-774
Author(s):  
Shingo ICHIMURA ◽  
Hidehiko NONAKA ◽  
Akira KUROKAWA ◽  
Ken NAKAMURA
Keyword(s):  
Silicon Dioxide ◽  
High Purity ◽  
Silicon Dioxide Film ◽  
Thin Silicon ◽  
Dioxide Film

Evaluation of nanoparticles embedded in thin silicon dioxide film by optical reflection property

2005 ◽  
Vol 196 (1-3) ◽  
pp. 44-49 ◽  
Author(s):  
Nobutoshi Arai ◽  
Hiroshi Tsuji ◽  
Kazuya Ueno ◽  
Takuya Matsumoto ◽  
Yasuhito Gotoh ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Film ◽  
Optical Reflection ◽  
Reflection Property ◽  
Thin Silicon ◽  
Dioxide Film
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