An ultrasensitive silicon pressure-based microflow sensor

1992 ◽  
Vol 39 (4) ◽  
pp. 825-835 ◽  
Author(s):  
S.T. Cho ◽  
K. Najafi ◽  
C.E. Lowman ◽  
K.D. Wise
Keyword(s):  
Microflow Sensor

scholarly journals Study and Evaluation of a PCB-MEMS Liquid Microflow Sensor

Sensors ◽  
2010 ◽  
Vol 10 (10) ◽  
pp. 8981-9001 ◽  
Author(s):  
Anastasios Petropoulos ◽  
Grigoris Kaltsas
Keyword(s):  
Microflow Sensor

Design and FEM simulation study of a microflow sensor based on piezoresistive PDMS composite for microfluidic systems

2016 ◽  
Vol 23 (5) ◽  
pp. 1275-1284 ◽  
Author(s):  
Nadir Belgroune ◽  
A. Hassein-Bey ◽  
A. L. S. Hassein-Bey ◽  
A. Tahraoui ◽  
B. Y. Majlis ◽  
...  
Keyword(s):  
Simulation Study ◽  
Fem Simulation ◽  
Microfluidic Systems ◽  
Microflow Sensor

Development of Microfluidic Flow Sensor in a Polymeric Microchip

Volume 4 ◽  
2004 ◽  
Author(s):  
Juan David Salgado ◽  
Keisuke Horiuchi ◽  
Prashanta Dutta
Keyword(s):  
Electric Field ◽  
Electric Fields ◽  
Electronic Circuit ◽  
Glass Plate ◽  
Flow Sensor ◽  
Pdms Layer ◽  
Appreciable Change ◽  
Microfluidic Flow ◽  
Channel Thickness ◽  
Microflow Sensor

A microfluidic flow sensor has been developed to precisely measure the flow rate in a micro/nanofluidic channel for lab-on-a-chip applications. Mixed electroosmotic and pressure driven microflows are investigated using this sensor. Our microflow sensor consists of two components: fluidic circuit and electronic circuit. The fluidic circuit is embedded into the microfluidic chip, which is formed during the microfabrication sequences. On the other hand, the electronic circuit is a microelectronic chip that works as a logical switch. We have tested the microflow sensor in a hybrid poly di-methyl-siloxane (PDMS)-glass microchip using de-ionized (DI) water. Softlithography techniques are used to form the basic microflow structure on a PDMS layer, and all sensing electrodes are deposited on a glass plate using sputtering technique. In this investigation, the microchannel thickness is varied between 3.5 and 10 microns, and the externally applied electric field is ranged between 100V/mm and 200V/mm. The thickness of the gold electrodes is kept below 100nm, and hence the flow disturbance due to the electrodes is very minimal. Fairly repeatable flow results are obtained for all the channel dimensions and electric fields. Moreover, for a particular electric field strength, there is an appreciable change in the flow velocity with the change of the channel thickness.

A plethysmographic technique for direct measurement of airway resistance in hamsters

1989 ◽  
Vol 66 (4) ◽  
pp. 1990-1994 ◽  
Author(s):  
S. Sato ◽  
S. Kato ◽  
E. Terada ◽  
K. Takahashi ◽  
S. Yasui
Keyword(s):  
Airway Resistance ◽  
Flow Sensor ◽  
Small Animals ◽  
Hot Wire ◽  
Pulmonary Resistance ◽  
Coefficients Of Variation ◽  
A New Technique ◽  
Male Golden Hamsters ◽  
Microflow Sensor ◽  
Gas Volume

We have developed a new technique to directly measure airway resistance (Raw) in small animals with a pressure-type body plethysmograph equipped with a hot-wire microflow sensor. Seventeen male golden hamsters weighing 70–84 g were studied. Change in alveolar pressure (delta PA) was calculated from total gas volume and the respired volume difference through the flow sensor between the midpoints of the tidal excursion curve, reflecting the thorax movement. The ratio of delta PA to the flow difference between those two midpoints gave Raw. Raw was compared with pulmonary resistance, and inspiratory and expiratory resistances were also compared. Raw was 0.44 +/- 0.06 (SE) cmH2O.ml-1.s. Mean of the coefficients of variation of Raw was 19.6 +/- 3.2% (SE). Raw was well correlated with pulmonary resistance (r = 0.93). We demonstrated that Raw could be directly measured in small animals with a hot-wire flow sensor and a plethysmographic technique, and the values were well correlated with previously reported pulmonary resistance.

Differential output type microflow sensor

1993 ◽  
Vol 76 (8) ◽  
pp. 83-88
Author(s):  
Masayoshi Esashi ◽  
Hiroshi Kawai ◽  
Kenichi Yoshimi
Keyword(s):  
Microflow Sensor
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