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2018 ◽  
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A. Bruyant ◽  
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Confined Phonons

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Silicon Resonators

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Daniel Judy ◽  
Jeffrey Pulskamp ◽  
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Silicon Resonators ◽  
Parallel Resonance ◽  
High Rejection

scholarly journals Low Temperature Sub-micron Gap Thin-film Silicon Resonators on Glass Substrate

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L. Teagno ◽  
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Thermally Actuated
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