scholarly journals Controlling surface statistical properties using bias voltage: Atomic force microscopy and stochastic analysis

2005 ◽  
Vol 71 (15) ◽  
Author(s):  
P. Sangpour ◽  
G. R. Jafari ◽  
O. Akhavan ◽  
A. Z. Moshfegh ◽  
M. Reza Rahimi Tabar
Keyword(s):  
Atomic Force Microscopy ◽  
Bias Voltage ◽  
Stochastic Analysis ◽  
Statistical Properties ◽  
Force Microscopy ◽  
Atomic Force

Si/SiGe Nanostructures Fabricated by Atomic Force Microscopy Oxidation

2001 ◽  
Vol 686 ◽  
Author(s):  
Xiang-Zheng Bo ◽  
Leonid P. Rokhinson ◽  
Haizhou Yin ◽  
D. C. Tsui ◽  
J. C. Sturm
Keyword(s):  
Atomic Force Microscopy ◽  
High Resolution ◽  
Quantum Well ◽  
Bias Voltage ◽  
Silicon Germanium ◽  
Force Microscopy ◽  
Atomic Force ◽  
Line Widths ◽  
Humidity Environment ◽  
Strained Sige

AbstractIn this work, local AFM oxidation technique in a controlled humidity environment has been used to create small features in strained SiGe alloys. When directly oxidizing SiGe alloys, minimum line widths of 20nm were achieved by adjusting parameters such as the bias voltage on the microscope tip and the tip writing speed. It was found that when bias voltage increases, and/or when the tip writing speed decreases, the oxidation height of silicon-germanium increases. In contrast to conventional thermal oxidation, the oxide height on SiGe alloys is slightly less than that on Si. Finally, this method was used to successfully cut conducting SiGe quantum well lines with high resolution.

scholarly journals Etched glass surfaces, atomic force microscopy and stochastic analysis

2007 ◽  
Vol 375 (1) ◽  
pp. 239-246 ◽  
Author(s):  
G.R. Jafari ◽  
M. Reza Rahimi Tabar ◽  
A. Iraji zad ◽  
G. Kavei
Keyword(s):  
Atomic Force Microscopy ◽  
Stochastic Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Glass Surfaces

Electrostatic Forces on the Surface of Metals as Measured by Atomic Force Microscopy

2000 ◽  
Vol 10 (1-2) ◽  
pp. 15
Author(s):  
Eugene Sprague ◽  
Julio C. Palmaz ◽  
Cristina Simon ◽  
Aaron Watson
Keyword(s):  
Atomic Force Microscopy ◽  
Electrostatic Forces ◽  
Force Microscopy ◽  
Atomic Force
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