Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires

2001 ◽  
Vol 63 (20) ◽  
Author(s):  
V. Holý ◽  
T. Roch ◽  
J. Stangl ◽  
A. Daniel ◽  
G. Bauer ◽  
...  
Langmuir ◽  
2004 ◽  
Vol 20 (23) ◽  
pp. 10303-10310 ◽  
Author(s):  
N. Hermsdorf ◽  
K. Sahre ◽  
P. Volodin ◽  
M. Stamm ◽  
K. J. Eichhorn ◽  
...  

2013 ◽  
Vol 21 (1) ◽  
pp. 161-164 ◽  
Author(s):  
Takayoshi Yamamoto ◽  
Hiroshi Okuda ◽  
Kohki Takeshita ◽  
Noritaka Usami ◽  
Yoshinori Kitajima ◽  
...  

Grazing-incidence small-angle X-ray scattering (GISAXS) measurements with soft X-rays have been applied to Ge nanodots capped with a Si layer. Spatially anisotropic distribution of nanodots resulted in strongly asymmetric GISAXS patterns in theqydirection in the soft X-ray region, which have not been observed with conventional hard X-rays. However, such apparent differences were explained by performing a GISAXS intensity calculation on the Ewald sphere,i.e.taking the curvature of Ewald sphere into account.


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