Grazing incidence small angle x-ray scattering study of the structure of nanoporous ultralow-k dielectrics prepared by plasma enhanced chemical vapor deposition

2009 ◽  
Vol 95 (2) ◽  
pp. 022901 ◽  
Author(s):  
V. Jousseaume ◽  
O. Gourhant ◽  
A. Zenasni ◽  
M. Maret ◽  
J.-P. Simon
Keyword(s):  
Chemical Vapor Deposition ◽  
Small Angle ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Study ◽  
Ray Scattering

In situ x-ray scattering study of PbTiO3 chemical-vapor deposition

2002 ◽  
Vol 80 (10) ◽  
pp. 1809-1811 ◽  
Author(s):  
M. V. Ramana Murty ◽  
S. K. Streiffer ◽  
G. B. Stephenson ◽  
J. A. Eastman ◽  
G.-R. Bai ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Study ◽  
Ray Scattering

scholarly journals Single-crystal CVD diamonds as small-angle X-ray scattering windows for high-pressure research

2012 ◽  
Vol 45 (3) ◽  
pp. 453-457 ◽  
Author(s):  
Suntao Wang ◽  
Yu-fei Meng ◽  
Nozomi Ando ◽  
Mark Tate ◽  
Szczesny Krasnicki ◽  
...  
Keyword(s):  
High Pressure ◽  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Small Angle ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
High Optical Quality ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Small-angle X-ray scattering (SAXS) was performed on single-crystal chemical vapor deposition (CVD) diamonds with low nitrogen concentrations, which were fabricated by microwave plasma-assisted chemical vapor deposition at high growth rates. High optical quality undoped 500 µm-thick single-crystal CVD diamonds grown without intentional nitrogen addition proved to be excellent as windows on SAXS cells, yielding parasitic scattering no more intense than a 7.5 µm-thick Kapton film. A single-crystal CVD diamond window was successfully used in a high-pressure SAXS cell.

Supported Particle Track Etched Polyimide Membranes:  A Grazing Incidence Small-Angle X-ray Scattering Study

Langmuir ◽  
2004 ◽  
Vol 20 (23) ◽  
pp. 10303-10310 ◽  
Author(s):  
N. Hermsdorf ◽  
K. Sahre ◽  
P. Volodin ◽  
M. Stamm ◽  
K. J. Eichhorn ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Particle Track ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Study ◽  
Polyimide Membranes ◽  
Ray Scattering

IN SITU X-RAY SCATTERING STUDIES OF CHEMICAL VAPOR DEPOSITION

1989 ◽  
Vol 50 (C7) ◽  
pp. C7-159-C7-168
Author(s):  
P. H. FUOSS ◽  
D. W. KISKER ◽  
S. BRENNAN ◽  
J. L. KAHN ◽  
G. RENAUD ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering
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