Tetrahedron-model analysis of silicon nitride thin films and the effect of hydrogen and temperature on their optical properties

1994 ◽  
Vol 50 (16) ◽  
pp. 11801-11816 ◽  
Author(s):  
J. Petalas ◽  
S. Logothetidis
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Silicon Nitride ◽  
Model Analysis

Influences of the nitrogen content on the morphological, chemical and optical properties of pulsed laser deposited silicon nitride thin films

2005 ◽  
Vol 192 (2-3) ◽  
pp. 225-230 ◽  
Author(s):  
J.M. Lackner ◽  
W. Waldhauser ◽  
R. Berghauser ◽  
R. Ebner ◽  
M. Beutl ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Silicon Nitride ◽  
Nitrogen Content ◽  
Pulsed Laser

Structure and optical properties of plasma‐deposited fluorinated silicon nitride thin films

1988 ◽  
Vol 63 (8) ◽  
pp. 2651-2659 ◽  
Author(s):  
Rhett E. Livengood ◽  
Mark A. Petrich ◽  
Dennis W. Hess ◽  
Jeffrey A. Reimer
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Silicon Nitride

Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride

2012 ◽  
Vol 51 (28) ◽  
pp. 6789 ◽  
Author(s):  
Jan Kischkat ◽  
Sven Peters ◽  
Bernd Gruska ◽  
Mykhaylo Semtsiv ◽  
Mikaela Chashnikova ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Optical Properties ◽  
Silicon Nitride ◽  
Aluminum Nitride ◽  
Aluminum Oxide ◽  
Silicon Dioxide ◽  
Mid Infrared ◽  
Infrared Optical Properties

Microstructure and optical properties of silicon nitride thin films as radiative cooling materials

Solar Energy ◽  
2002 ◽  
Vol 72 (6) ◽  
pp. 505-510 ◽  
Author(s):  
Zongcun Liang ◽  
Hui Shen ◽  
Jianhong Li ◽  
Ningsheng Xu
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Silicon Nitride ◽  
Radiative Cooling

Silicon nitride thin films by low voltage reactive ion plating: optical properties and composition

1989 ◽  
Vol 28 (20) ◽  
pp. 4436 ◽  
Author(s):  
Bertrand G. Bovard ◽  
Juergen Ramm ◽  
Ralf Hora ◽  
Fritz Hanselmann
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Silicon Nitride ◽  
Low Voltage ◽  
Ion Plating
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