Impurity lattice location in ion-implanted beryllium: Measurements and systematics

1980 ◽  
Vol 22 (1) ◽  
pp. 63-79 ◽  
Author(s):  
R. Vianden ◽  
E. N. Kaufmann ◽  
J. W. Rodgers
Keyword(s):  
Lattice Location ◽  
Ion Implanted

Lattice Location of Ion Implanted Dopants in GaAs Using Radioactive Probes

1991 ◽  
Vol 38-41 ◽  
pp. 1221-1226 ◽  
Author(s):  
S. Winter ◽  
S. Blässer ◽  
H. Hofsäss ◽  
S.G. Jahn ◽  
G. Lindner ◽  
...  
Keyword(s):  
Lattice Location ◽  
Ion Implanted

Channeling Measurements on Deuterium Implanted Silicon

1985 ◽  
Vol 59 ◽  
Author(s):  
B. Bech Nielsen
Keyword(s):  
Nuclear Reaction ◽  
Tetrahedral Site ◽  
Lattice Location ◽  
Temperature Range ◽  
Bond Center ◽  
Ion Implanted

ABSTRACTThe channeling technique has been used to study the lattice location of deuterium ion-implanted into silicon. Compared to earlier measurements by Picraux and Vook, the temperature range has been extended from 30 to 500 K, and the dose has been decreased down to ≃ 8 × 1014 D/cm2. The implantation was performed at 30 K gnd at an energy of 10 keV. The channeling analysis was done using the d(3 He,p)4 He nuclear reaction. Angular scans were measured along the <100>, <110>, <111> axis and the {100}, {110}, {111} planes, Experiments were carried out on the implanted sample (30K) and after annealing to 200 and 500 K. In the as-implanted sample, 80% of the deuterium is located close to the bond center, whereas the remaining 20% is placed at the tetrahedral site. The deuterium sites change after annealing to 200 and 50OK, and the nature of these annealings stages will be discussed.

The Lattice Location and Electrical Activity of Ion-Implanted Sn in InP

1993 ◽  
Vol 143-147 ◽  
pp. 271-276
Author(s):  
G. Weyer ◽  
P. Kringhøj ◽  
Kristian Freitag
Keyword(s):  
Electrical Activity ◽  
Lattice Location ◽  
Ion Implanted

Boron lattice location in room temperature ion implanted Si crystal

2005 ◽  
Vol 124-125 ◽  
pp. 249-252 ◽  
Author(s):  
A.M. Piro ◽  
L. Romano ◽  
S. Mirabella ◽  
M.G. Grimaldi
Keyword(s):  
Room Temperature ◽  
Lattice Location ◽  
Ion Implanted
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