scholarly journals Planar Coil Optimization in a Magnetically Shielded Cylinder

2021 ◽  
Vol 15 (6) ◽  
Author(s):  
M. Packer ◽  
P.J. Hobson ◽  
N. Holmes ◽  
J. Leggett ◽  
P. Glover ◽  
...  
Keyword(s):  
Planar Coil ◽  
Coil Optimization

scholarly journals Experimental Study on Ultrasonic Vibration-Assisted WECDM of Glass Microstructures with a High Aspect Ratio

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 125
Author(s):  
Yan Chen ◽  
Xu Feng ◽  
Gongming Xin
Keyword(s):  
Aspect Ratio ◽  
Ultrasonic Vibration ◽  
High Aspect Ratio ◽  
Rapid Development ◽  
Glass Plate ◽  
Slit Width ◽  
Critical Voltage ◽  
Machining Parameters ◽  
Planar Coil ◽  
Helical Electrode

With the rapid development of micro-electro-mechanical systems (MEMSs), the demand for glass microstructure is increasing. For the purpose of achieving high quality and stable machining of glass microstructures with a high aspect ratio, ultrasonic vibration is applied into the micro-wire electrochemical discharge machining (WECDM), which is proposed as ultrasonic vibration-assisted WECDM with a micro helical electrode. Firstly, the formation of a gas film on the surface of the helical electrode in WECDM machining is simulated, meaning the thickness of the gas film can be reduced by adding suitable ultrasonic amplitude, thus reducing the critical voltage, then the machining localization and stability were enhanced. Then, the micro helical electrode with a diameter of 100 μm is used to carry out sets of experiments that study the influence of ultrasonic amplitude, machining voltage, duty factor, pulse frequency, and feed rate on the slit width. The experimental results show that the machining stability and quality are significantly improved by adding suitable ultrasonic amplitude. When the amplitude was 5.25 μm, the average slit width was reduced to 128.63 μm with a decrease of 20.78%. Finally, with the optimized machining parameters, micro planar coil structure and microcantilever structure with a high aspect ratio were fabricated successfully on the glass plate. It is proved that ultrasonic vibration-assisted WECDM with the micro helical electrode method can meet the requirements of high aspect ratio microstructure machining for hard and brittle materials.

Magnetothermal behavior of a planar coil

2021 ◽  
Author(s):  
Fatima Zohra Medjaoui ◽  
Abderrahim Mokhfi ◽  
Yacine Guettaf ◽  
Pierre Spetiri ◽  
Azzedine Hamid
Keyword(s):  
Planar Coil

Pattern Writing by Implantation in a Large-Scale PSII System With Planar Inductively Coupled Plasma Source

2000 ◽  
Vol 624 ◽  
Author(s):  
Lingling Wu ◽  
Hongjun Gao ◽  
Dennis M. Manos
Keyword(s):  
Inductively Coupled Plasma ◽  
Large Scale ◽  
Lateral Diffusion ◽  
Plasma Source ◽  
Direct Writing ◽  
Large Area ◽  
Depth Profiles ◽  
Geometric Patterns ◽  
Planar Coil ◽  
Rf Antenna

ABSTRACTA large-scale plasma source immersion ion implantation (PSII) system with planar coil RFI plasma source has been used to study an inkless, deposition-free, mask-based surface conversion patterning as an alternative to direct writing techniques on large-area substrates by implantation. The apparatus has a 0.61 m ID and 0.51 m tall chamber, with a base pressure in the 10−8 Torr range, making it one of the largest PSII presently available. The system uses a 0.43 m ID planar rf antenna to produce dense plasma capable of large-area, uniform materials treatment. Metallic and semiconductor samples have been implanted through masks to produce small geometric patterns of interest for device manufacturing. Si gratings were also implanted to study application to smaller features. Samples are characterized by AES, TEM and variable-angle spectroscopic ellipsometry. Composition depth profiles obtained by AES and VASE are compared. Measured lateral and depth profiles are compared to the mask features to assess lateral diffusion, pattern transfer fidelity, and wall-effects. The paper also presents the results of MAGIC calculations of the flux and angle of ion trajectories through the boundary layer predicting the magnitude of flux as a function of 3-D location on objects in the expanding sheath

Current distribution in circular planar coil

2013 ◽  
Vol 37 (4) ◽  
pp. 747-756 ◽  
Author(s):  
I. Papagiannopoulos ◽  
G. De Mey ◽  
V. Chatziathanasiou
Keyword(s):  
Current Distribution ◽  
Planar Coil

Microactuator based on electroplated permanent magnets and flexible polydimethyl siloxane diaphragm

2008 ◽  
Vol 222 (3) ◽  
pp. 517-524 ◽  
Author(s):  
Y Su ◽  
H Wang ◽  
W Chen
Keyword(s):  
Permanent Magnets ◽  
Magnetic Energy ◽  
Optical Switch ◽  
Geometrical Parameters ◽  
Maximum Deflection ◽  
Polydimethyl Siloxane ◽  
Flexible Membrane ◽  
Microelectromechanical System ◽  
Planar Coil ◽  
A Current

The design, fabrication, and testing of a novel bidirectional magnetic microactuator were presented in the paper. The microactuator is composed of an integrated planar coil and a flexible polydimethyl siloxane (PDMS) diaphragm with embedded CoNiMnP-based permanent magnet arrays. There is a 7 × 7 array of magnets in a unit. The PDMS diaphragm is 2 mm × mm × 40 μm and the magnet post is 50 × 50 × 20 μm. Computer simulation was applied to verify the geometrical parameters. Electroplating under external magnetic field is carried out to improve the magnetic properties of the electroplated magnet, including coercivity, remanence and magnetic energy, and so on. The measured maximum coercivity, remanence and maximum magnetic energy were 2623 Oe (208.73 kA/m), 0.2 T (2000 G), and 10.15 kJ/m3 with the magnetic post, respectively. Moreover, and the deflection of the PDMS membrane is proportional to the exciting current. In a case of 0.35 A current, the maximum deflection of the membrane is 45 μm. Adjusting the electroplating mould results in the variation of the electroplated structure, thus the calibration of the microactuator. Due to the biomedical compatibility and simplicity of the fabrication, the flexible membrane-based microactuator is potential to be used as micropump and optical switch, the microelectromechanical system applications.

Magnetic-multi-turn planar coil inductor

1991 ◽  
Vol 27 (6) ◽  
pp. 5438-5440 ◽  
Author(s):  
H. Matsuki ◽  
N. Fujii ◽  
K. Shirakawa ◽  
J. Toriu ◽  
K. Murakami
Keyword(s):  
Planar Coil

scholarly journals Spiral planar coil design for the intracranial pressure sensor

2018 ◽  
Vol 1 (3) ◽  
pp. e10012
Author(s):  
Fa Wang ◽  
Xuan Zhang ◽  
Mehdi Shokoueinejad ◽  
Bermans J. Iskandar ◽  
John G. Webster ◽  
...  
Keyword(s):  
Intracranial Pressure ◽  
Pressure Sensor ◽  
Coil Design ◽  
Planar Coil
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