scholarly journals In Situ Sub-50-Attosecond Active Stabilization of the Delay Between Infrared and Extreme-Ultraviolet Light Pulses

2021 ◽  
Vol 15 (3) ◽  
Author(s):  
Martin Luttmann ◽  
David Bresteau ◽  
Jean-François Hergott ◽  
Olivier Tcherbakoff ◽  
Thierry Ruchon
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Pulses ◽  
Active Stabilization ◽  
Extreme Ultraviolet Light

Plasmonic generation of ultrashort extreme-ultraviolet light pulses

2011 ◽  
Vol 5 (11) ◽  
pp. 677-681 ◽  
Author(s):  
In-Yong Park ◽  
Seungchul Kim ◽  
Joonhee Choi ◽  
Dong-Hyub Lee ◽  
Young-Jin Kim ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Pulses ◽  
Extreme Ultraviolet Light

Development of an in-situ Sn cleaning method for extreme ultraviolet light lithography

2011 ◽  
Author(s):  
J. Sporre ◽  
R. E. Lofgren ◽  
D. N. Ruzic ◽  
O. V. Khodykin ◽  
D. W. Myers
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Cleaning Method ◽  
Extreme Ultraviolet Light

Plasmonic field enhancement for generating ultrashort extreme-ultraviolet light pulses

2011 ◽  
Author(s):  
In-Yong Park ◽  
Seungchul Kim ◽  
Joonhee Choi ◽  
Dong-Hyub Lee ◽  
Seung-Woo Kim
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Field Enhancement ◽  
Light Pulses ◽  
Extreme Ultraviolet Light

Development of Tool for Contamination Layer Thickness Measurement Using High Power Extreme Ultraviolet Light and in Situ Ellipsometer

2013 ◽  
Vol 52 (5R) ◽  
pp. 056701 ◽  
Author(s):  
Takeo Watanabe ◽  
Yukiko Kikuchi ◽  
Toshiya Takahashi ◽  
Kazuhiro Katayama ◽  
Isamu Takagi ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Ultraviolet Light ◽  
High Power ◽  
Extreme Ultraviolet ◽  
Thickness Measurement ◽  
Extreme Ultraviolet Light

scholarly journals Near infrared and extreme ultraviolet light pulses induced modifications of ultrathin Co films

AIP Advances ◽  
2017 ◽  
Vol 7 (5) ◽  
pp. 056313 ◽  
Author(s):  
Jan Kisielewski ◽  
Iosif Sveklo ◽  
Zbigniew Kurant ◽  
Andrzej Bartnik ◽  
Marcin Jakubowski ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Near Infrared ◽  
Extreme Ultraviolet ◽  
Light Pulses ◽  
Extreme Ultraviolet Light

Tailoring extreme-ultraviolet light

2017 ◽  
Vol 11 (4) ◽  
pp. 209-210
Author(s):  
Taro Sekikawa ◽  
Kenichi L. Ishikawa
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light

Lasing of extreme ultraviolet light with nitrogen plasma in a recombining phase—Roles of doubly excited states

2012 ◽  
Vol 19 (6) ◽  
pp. 063302 ◽  
Author(s):  
Takuya Ozawa ◽  
Shuhei Yamamura ◽  
Nao Tatsumura ◽  
Kazuhiko Horioka ◽  
Tohru Kawamura
Keyword(s):  
Excited States ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Nitrogen Plasma ◽  
Doubly Excited States ◽  
Doubly Excited ◽  
Extreme Ultraviolet Light
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