scholarly journals Electric shielding films for biased TEM samples and their application to in situ electron holography

Microscopy ◽  
2018 ◽  
Vol 67 (3) ◽  
pp. 178-186 ◽  
Author(s):  
Yuki Nomura ◽  
Kazuo Yamamoto ◽  
Tsukasa Hirayama ◽  
Koh Saitoh
2012 ◽  
Vol 18 (S2) ◽  
pp. 1292-1293 ◽  
Author(s):  
T. Tanji ◽  
A.H. Tavabi

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.


2010 ◽  
Vol 16 (S2) ◽  
pp. 576-577
Author(s):  
L Huang ◽  
Y Zhu

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.


2011 ◽  
Vol 17 (S2) ◽  
pp. 484-485 ◽  
Author(s):  
A Tavabi ◽  
T Tanji

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.


2021 ◽  
Author(s):  
Maria Brodovoi ◽  
Kilian Gruel ◽  
Lucas Chapuis ◽  
Aurélien Masseboeuf ◽  
Cécile Marcelot ◽  
...  

Abstract In response to a continually rising demand for high performance and low-cost devices, and equally driven by competitivity, the microelectronics industry excels in meeting innovation challenges and further miniaturizing products. However, device shrinkage and the increasing complexity of device architecture require local quantitative studies. In this paper, we demonstrate with a case study on a nanocapacitor, the capability of transmission electron microscopy in electron holography mode to be a unique in-situ technique for mapping electric fields and charge distributions on a single device.


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