High-resolution three-dimensional scanning transmission electron microscopy characterization of oxide-nitride-oxide layer interfaces in Si-based semiconductors using computed tomography

2011 ◽  
Vol 60 (3) ◽  
pp. 243-251
Author(s):  
S. Sadayama ◽  
H. Sekiguchi ◽  
A. Bright ◽  
N. Suzuki ◽  
K. Yamada ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Computed Tomography ◽  
Scanning Transmission Electron Microscopy ◽  
Three Dimensional ◽  
Transmission Electron ◽  
Transmission Electron Microscopy Characterization ◽  
Scanning Transmission ◽  
Nitride Oxide ◽  
Microscopy Characterization

scholarly journals Measuring the Autocorrelation Function of Nanoscale Three-Dimensional Density Distribution in Individual Cells Using Scanning Transmission Electron Microscopy, Atomic Force Microscopy, and a New Deconvolution Algorithm

2017 ◽  
Vol 23 (3) ◽  
pp. 661-667 ◽  
Author(s):  
Yue Li ◽  
Di Zhang ◽  
Ilker Capoglu ◽  
Karl A. Hujsak ◽  
Dhwanil Damania ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Density Distribution ◽  
Scanning Transmission Electron Microscopy ◽  
Mass Density ◽  
Three Dimensional ◽  
Force Microscopy ◽  
Statistical Measures ◽  
Atomic Force ◽  
Transmission Electron ◽  
Scanning Transmission

AbstractEssentially all biological processes are highly dependent on the nanoscale architecture of the cellular components where these processes take place. Statistical measures, such as the autocorrelation function (ACF) of the three-dimensional (3D) mass–density distribution, are widely used to characterize cellular nanostructure. However, conventional methods of reconstruction of the deterministic 3D mass–density distribution, from which these statistical measures can be calculated, have been inadequate for thick biological structures, such as whole cells, due to the conflict between the need for nanoscale resolution and its inverse relationship with thickness after conventional tomographic reconstruction. To tackle the problem, we have developed a robust method to calculate the ACF of the 3D mass–density distribution without tomography. Assuming the biological mass distribution is isotropic, our method allows for accurate statistical characterization of the 3D mass–density distribution by ACF with two data sets: a single projection image by scanning transmission electron microscopy and a thickness map by atomic force microscopy. Here we present validation of the ACF reconstruction algorithm, as well as its application to calculate the statistics of the 3D distribution of mass–density in a region containing the nucleus of an entire mammalian cell. This method may provide important insights into architectural changes that accompany cellular processes.

Transmission Electron Microscopy Characterization of Position-Controlled InN Nanocolumns

2008 ◽  
Vol 47 (7) ◽  
pp. 5330-5332 ◽  
Author(s):  
Satoshi Harui ◽  
Hidetoshi Tamiya ◽  
Takanobu Akagi ◽  
Hideto Miyake ◽  
Kazumasa Hiramatsu ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Transmission Electron ◽  
Transmission Electron Microscopy Characterization ◽  
Microscopy Characterization
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