Quantitative backscattered electron imaging of field emission scanning electron microscopy for discrimination of nano-scale elements with nm-order spatial resolution

2010 ◽  
Vol 59 (5) ◽  
pp. 379-385 ◽  
Author(s):  
H. Kim ◽  
T. Negishi ◽  
M. Kudo ◽  
H. Takei ◽  
K. Yasuda
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