Anisotropic pyrochemical dry etching of fluorinated ethylene propylene induced by pre-irradiation with synchrotron radiation
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2008 ◽
Vol 26
(6)
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pp. 2473-2477
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2018 ◽
Vol 43
(48)
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pp. 21918-21927
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2018 ◽
Vol 25
(3)
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pp. 808-815
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2012 ◽
Vol 14
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pp. 329-335
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