Investigation of interstage channel of hybrid turbomolecular pump

2021 ◽  
Author(s):  
J. A. Shostak ◽  
N. K. Nikulin ◽  
P. A. Shostak ◽  
G. T. Tsakadze ◽  
E. V. Svichkar
Keyword(s):  
Turbomolecular Pump

A new pumping disk for use in a turbomolecular pump with various length blades

Vacuum ◽  
1991 ◽  
Vol 42 (3) ◽  
pp. 199-200
Author(s):  
Tu Jiyuan ◽  
Zhu Yu ◽  
Wang Xianzhang
Keyword(s):  
Turbomolecular Pump

scholarly journals Digital Linear Control System for a Magnetic Bearing System of a High Vacuum Turbomolecular Pump

2010 ◽  
Vol 19 (4) ◽  
pp. 256-264
Author(s):  
Seung-Kook Ro ◽  
Jin-Ho Kyung ◽  
Jong-Kweon Park ◽  
Woo-Ho Nam ◽  
Deug-Yong Koh
Keyword(s):  
Control System ◽  
High Vacuum ◽  
Magnetic Bearing ◽  
Linear Control System ◽  
Linear Control ◽  
Turbomolecular Pump ◽  
Bearing System

The pumping character of the magnetic suspension‐type turbomolecular pump of high flow rate

1987 ◽  
Vol 5 (5) ◽  
pp. 2965-2967 ◽  
Author(s):  
Tadao Ishizawa ◽  
Masaharu Miki ◽  
Chiaki Urano ◽  
Toshiaki Kawashima ◽  
Masayuki Yamamoto ◽  
...  
Keyword(s):  
Flow Rate ◽  
High Flow ◽  
High Flow Rate ◽  
Magnetic Suspension ◽  
Turbomolecular Pump
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