Study of the iron distribution profile and the influence of annealing on the structure implanted in silicon
1986 ◽
Vol 261
(10)
◽
pp. 4587-4593
◽
Keyword(s):
1972 ◽
Vol Vol. 42
◽
2017 ◽
Vol 95
(4-5)
◽
pp. 375-387
◽
1972 ◽
Vol 3
(3)
◽
pp. 177-182
◽
Keyword(s):