Erratum: “Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films” [Appl. Phys. Lett. 118, 102901 (2021)]
2009 ◽
Vol 42
(17)
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pp. 175506
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2011 ◽
Vol 495
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pp. 108-111
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Keyword(s):
2011 ◽
Vol 26
(3-4)
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pp. 267-280
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