Intermixing reduction in ultra-thin titanium nitride/hafnium oxide film stacks grown on oxygen-inserted silicon and associated reduction of the interface charge dipole

2021 ◽  
Vol 130 (18) ◽  
pp. 185303
Author(s):  
Jeffrey A. Smith ◽  
Kai Ni ◽  
Hideki Takeuchi ◽  
Robert J. Stephenson ◽  
Yi-Ann Chen ◽  
...  
Keyword(s):  
Oxide Film ◽  
Titanium Nitride ◽  
Hafnium Oxide ◽  
Interface Charge

scholarly journals X-ray absorption spectroscopy study on oxygen-deficient hafnium oxide film

2008 ◽  
Vol 100 (4) ◽  
pp. 042044 ◽  
Author(s):  
D-Y Cho ◽  
C-H Min ◽  
J-Y Kim ◽  
J-H Park ◽  
S-J Oh ◽  
...  
Keyword(s):  
Oxide Film ◽  
Absorption Spectroscopy ◽  
Hafnium Oxide ◽  
Spectroscopy Study ◽  
X Ray ◽  
X Ray Absorption

Laser-driven detonation wave in hafnium oxide film: Defect controlled laser damage and ablation

2020 ◽  
Vol 128 (12) ◽  
pp. 123101
Author(s):  
Yejia Xu ◽  
David H. Dunlap ◽  
Luke A. Emmert ◽  
Wolfgang Rudolph
Keyword(s):  
Detonation Wave ◽  
Oxide Film ◽  
Hafnium Oxide ◽  
Laser Damage ◽  
Film Defect

Thermal stability of an ultrathin hafnium oxide film on plasma nitrided Si(100)

2013 ◽  
Vol 616 ◽  
pp. 104-109 ◽  
Author(s):  
K. Skaja ◽  
F. Schönbohm ◽  
D. Weier ◽  
T. Lühr ◽  
C. Keutner ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Oxide Film ◽  
Hafnium Oxide ◽  
Thermal Stability Of

Facing-target mid-frequency magnetron reactive sputtered hafnium oxide film: Morphology and electrical properties

2016 ◽  
Vol 68 (5) ◽  
pp. 679-685
Author(s):  
Yu Zhang ◽  
Jun Xu ◽  
You-Nian Wang ◽  
Chi Kyu Choi ◽  
Da-Yu Zhou
Keyword(s):  
Electrical Properties ◽  
Oxide Film ◽  
Hafnium Oxide ◽  
Film Morphology

Mechanism and kinetics of thin zirconium and hafnium oxide film growth in an ALD reactor

2004 ◽  
Vol 549 (1) ◽  
pp. 67-86 ◽  
Author(s):  
Maxim Deminsky ◽  
Andrei Knizhnik ◽  
Ivan Belov ◽  
Stanislav Umanskii ◽  
Elena Rykova ◽  
...  
Keyword(s):  
Oxide Film ◽  
Hafnium Oxide ◽  
Film Growth ◽  
Mechanism And Kinetics ◽  
Kinetics Of

Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation

2008 ◽  
Vol 48 (11-12) ◽  
pp. 1765-1768 ◽  
Author(s):  
Banani Sen ◽  
B.L. Yang ◽  
Hei Wong ◽  
C.W. Kok ◽  
P.K. Chu ◽  
...  
Keyword(s):  
Oxide Film ◽  
Ion Implantation ◽  
Hafnium Oxide ◽  
Plasma Immersion Ion Implantation
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