Metalorganic chemical vapor deposition of α-Ga2O3 and α-(AlxGa1−x)2O3 thin films on m-plane sapphire substrates

A F M Anhar Uddin Bhuiyan; Zixuan Feng; Hsien-Lien Huang; Lingyu Meng; Jinwoo Hwang; Hongping Zhao

doi:10.1063/5.0065087

Metalorganic chemical vapor deposition of α-Ga2O3 and α-(AlxGa1−x)2O3 thin films on m-plane sapphire substrates

APL Materials ◽

10.1063/5.0065087 ◽

2021 ◽

Vol 9 (10) ◽

pp. 101109

Author(s):

A F M Anhar Uddin Bhuiyan ◽

Zixuan Feng ◽

Hsien-Lien Huang ◽

Lingyu Meng ◽

Jinwoo Hwang ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Crystalline quality and surface morphology of (100) CeO2 thin films grown on sapphire substrates by solid source metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(95)00253-7 ◽

1995 ◽

Vol 156 (3) ◽

pp. 227-234 ◽

Cited By ~ 29

Author(s):

Z. Lu ◽

R. Hiskes ◽

S.A. DiCarolis ◽

A. Nel ◽

R.K. Route ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Surface Morphology ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystalline Quality ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Characterization of MgxZn1−xO thin films grown on sapphire substrates by metalorganic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.10.036 ◽

2011 ◽

Vol 519 (6) ◽

pp. 1966-1970 ◽

Cited By ~ 12

Author(s):

C.C. Wu ◽

D.S. Wuu ◽

P.R. Lin ◽

T.N. Chen ◽

R.H. Horng ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Rutherford backscattering and optical studies for ZnO thin films on sapphire substrates grown by metalorganic chemical vapor deposition

10.1117/12.859109 ◽

2010 ◽

Author(s):

Yee Ling Chung ◽

Lin Li ◽

Shude Yao ◽

Zhe Chuan Feng ◽

William E. Fenwick ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Rutherford Backscattering ◽

Zno Thin Films ◽

Optical Studies ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Surface, structural and optical properties of AlN thin films grown on different face sapphire substrates by metalorganic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2018.07.138 ◽

2018 ◽

Vol 458 ◽

pp. 972-977 ◽

Cited By ~ 5

Author(s):

Yao Li ◽

Chi Zhang ◽

Xuguang Luo ◽

Yuanlan Liang ◽

Dong-Sing Wuu ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Structural And Optical Properties ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Effect of Substrates and Thermal Treatments on Metalorganic Chemical Vapor Deposition-Grown Sb2Te3 Thin Films

Crystal Growth & Design ◽

10.1021/acs.cgd.1c00508 ◽

2021 ◽

Author(s):

Martino Rimoldi ◽

Raimondo Cecchini ◽

Claudia Wiemer ◽

Emanuele Longo ◽

Stefano Cecchi ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Thermal Treatments ◽

Metalorganic Chemical

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Fabrication of aluminum oxide thin films by a low‐pressure metalorganic chemical vapor deposition technique

Applied Physics Letters ◽

10.1063/1.108838 ◽

1993 ◽

Vol 62 (7) ◽

pp. 681-683 ◽

Cited By ~ 34

Author(s):

J. S. Kim ◽

H. A. Marzouk ◽

P. J. Reucroft ◽

J. D. Robertson ◽

C. E. Hamrin

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Aluminum Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Metalorganic Chemical

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Heteroepitaxial AlN growth 4on c-plane sapphire substrates by ammonia-free high temperature metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2021.126496 ◽

2022 ◽

pp. 126496

Author(s):

Xu-Qiang Shen ◽

Kazutoshi Kojima

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Low-pressure Metalorganic Chemical Vapor Deposition and Characterization of YBa2Cu3O7−x Thin Films

Superconductivity and Applications ◽

10.1007/978-1-4684-7565-4_11 ◽

1990 ◽

pp. 127-138

Author(s):

P. Zawadzki ◽

G. S. Tompa ◽

P. Norris ◽

D. W. Noh ◽

B. Gallois ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Metalorganic Chemical

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Epitaxial thin films of YBa2Cu3O7−xon LaAlO3substrates deposited by plasma‐enhanced metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.104973 ◽

1991 ◽

Vol 58 (2) ◽

pp. 185-187 ◽

Cited By ~ 36

Author(s):

C. S. Chern ◽

J. Zhao ◽

Y. Q. Li ◽

P. Norris ◽

B. Kear ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Thin Films ◽

Metalorganic Chemical

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Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films

Journal of Applied Physics ◽

10.1063/1.373005 ◽

2000 ◽

Vol 87 (10) ◽

pp. 7430-7437 ◽

Cited By ~ 13

Author(s):

Y. Gao ◽

C. L. Perkins ◽

S. He ◽

P. Alluri ◽

T. Tran ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Mechanistic Study ◽

Metalorganic Chemical

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