scholarly journals Experimental and numerical study of the plasma in coaxial capacitive coupled radio frequency discharge

2021 ◽  
Vol 130 (12) ◽  
pp. 123302
Author(s):  
Sara Alhomsi ◽  
Gérard Bauville ◽  
Stéphane Pasquiers ◽  
Tiberiu Minea
Keyword(s):  
Radio Frequency ◽  
Numerical Study ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge
Sign in / Sign up

Export Citation Format

Share Document