Non-axisymmetric droplet irradiation effects on ion and extreme ultraviolet light emission of laser-produced plasma light sources

2021 ◽  
Vol 129 (23) ◽  
pp. 233306
Author(s):  
Markus Brandstätter ◽  
Marco M. Weber ◽  
Reza S. Abhari
Keyword(s):  
Ultraviolet Light ◽  
Light Emission ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Irradiation Effects ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Laser produced plasma for efficient extreme ultraviolet light sources

2012 ◽  
Author(s):  
Tony Donnelly ◽  
Thomas Cummins ◽  
Colm O' Gorman ◽  
Bowen Li ◽  
Colm S. Harte ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 µm-wavelength laser

2021 ◽  
Author(s):  
Yun Yuan ◽  
Yan-Yun Ma ◽  
Wenpeng Wang ◽  
Shijia Chen ◽  
Ye Cui ◽  
...  
Keyword(s):  
Energy Conversion ◽  
Emission Spectrum ◽  
Ultraviolet Light ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Band Emission ◽  
Percentage Points ◽  
Hydrodynamic Code ◽  
Extreme Ultraviolet Light

Abstract In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 µm and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of SP for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).

scholarly journals Observation of extreme ultraviolet light emission from an expanding plasma jet with multiply charged argon or xenon ions

2018 ◽  
Vol 113 (15) ◽  
pp. 153502 ◽  
Author(s):  
A. G. Shalashov ◽  
A. V. Vodopyanov ◽  
I. S. Abramov ◽  
A. V. Sidorov ◽  
E. D. Gospodchikov ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Light Emission ◽  
Extreme Ultraviolet ◽  
Plasma Jet ◽  
Multiply Charged ◽  
Extreme Ultraviolet Light

scholarly journals Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma

2015 ◽  
Author(s):  
Eiki Hotta ◽  
Yusuke Sakai ◽  
Yasushi Hayashi ◽  
Gohta Niimi ◽  
Bin Huang ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
X Ray ◽  
Extreme Ultraviolet Light

Dynamic Characteristics of Laser-Assisted Discharge Plasmas for Extreme Ultraviolet Light Sources

2010 ◽  
Vol 49 (9) ◽  
pp. 096202 ◽  
Author(s):  
Peng Lu ◽  
Sunao Katsuki ◽  
Nobufumi Tomimaru ◽  
Takahisa Ueno ◽  
Hidenori Akiyama
Keyword(s):  
Ultraviolet Light ◽  
Dynamic Characteristics ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Discharge Plasmas ◽  
Extreme Ultraviolet Light
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