scholarly journals Theoretical analysis of the impacts of light illumination on the transient current of sputter-deposited non-doped ZnO films

AIP Advances ◽  
2021 ◽  
Vol 11 (1) ◽  
pp. 015030
Author(s):  
Yasuhisa Omura ◽  
Shingo Sato
Keyword(s):  
Theoretical Analysis ◽  
Transient Current ◽  
Zno Films ◽  
Light Illumination ◽  
Doped Zno ◽  
Sputter Deposited

Organic acid-based wet etching behaviors of Ga-doped ZnO films sputter-deposited at different substrate temperatures

2010 ◽  
Vol 518 (14) ◽  
pp. 4046-4051 ◽  
Author(s):  
Dong-Kyoon Lee ◽  
Jungsik Bang ◽  
Mungi Park ◽  
Jae-Ho Lee ◽  
Heesun Yang
Keyword(s):  
Organic Acid ◽  
Wet Etching ◽  
Zno Films ◽  
Doped Zno ◽  
Sputter Deposited ◽  
Substrate Temperatures

Studies on the properties of sputter-deposited Al-doped ZnO films

2008 ◽  
Vol 44 (3) ◽  
pp. 268-275 ◽  
Author(s):  
M. Selmi ◽  
F. Chaabouni ◽  
M. Abaab ◽  
B. Rezig
Keyword(s):  
Zno Films ◽  
Doped Zno ◽  
Sputter Deposited

Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition

2018 ◽  
Author(s):  
Peter George Gordon ◽  
Goran Bacic ◽  
Gregory P. Lopinski ◽  
Sean Thomas Barry
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Atomic Ratio ◽  
Aluminum Concentration ◽  
Zno Films ◽  
Transparent Conductor ◽  
Kelvin Probe ◽  
Layer Deposition ◽  
Earth Abundant ◽  
Doped Zno

Al-doped ZnO (AZO) is a promising earth-abundant alternative to Sn-doped In<sub>2</sub>O<sub>3</sub> (ITO) as an n-type transparent conductor for electronic and photovoltaic devices; AZO is also more straightforward to deposit by atomic layer deposition (ALD). The workfunction of this material is particularly important for the design of optoelectronic devices. We have deposited AZO films with resistivities as low as 1.1 x 10<sup>-3</sup> Ωcm by ALD using the industry-standard precursors trimethylaluminum (TMA), diethylzinc (DEZ), and water at 200<sup>◦</sup>C. These films were transparent and their elemental compositions showed reasonable agreement with the pulse program ratios. The workfunction of these films was measured using a scanning Kelvin Probe (sKP) to investigate the role of aluminum concentration. In addition, the workfunction of AZO films prepared by two different ALD recipes were compared: a “surface” recipe wherein the TMA was pulsed at the top of each repeating AZO stack, and a interlamellar recipe where the TMA pulse was introduced halfway through the stack. As aluminum doping increases, the surface recipe produces films with a consistently higher workfunction as compared to the interlamellar recipe. The resistivity of the surface recipe films show a minimum at a 1:16 Al:Zn atomic ratio and using an interlamellar recipe, minimum resistivity was seen at 1:19. The film thicknesses were characterized by ellipsometry, chemical composition by EDX, and resistivity by four-point probe.<br>

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure
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