Low temperature atomic layer deposition of GaOxNy thin film on III-GaN:Mg for UV photodetector

2020 ◽  
Vol 117 (21) ◽  
pp. 211101
Author(s):  
Longxing Su ◽  
Sheng-Yu Chen ◽  
Lianqi Zhao ◽  
Yuqing Zuo ◽  
Jin Xie
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Uv Photodetector ◽  
Layer Deposition

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Flexible thin film pH sensor based on low-temperature atomic layer deposition

2017 ◽  
Vol 11 (7) ◽  
pp. 1700123 ◽  
Author(s):  
Markus H. Jakob ◽  
Sebastian Gutsch ◽  
Claire Chatelle ◽  
Abinaya Krishnaraja ◽  
John Fahlteich ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Ph Sensor ◽  
Atomic Layer ◽  
Layer Deposition

Covalent graphite modification by low-temperature photocatalytic oxidation using titanium dioxide thin film prepared by atomic layer deposition

2021 ◽  
Author(s):  
Niels R. Ostyn ◽  
Sreeprasanth Pulinthanathu Sree ◽  
Jin Li ◽  
Ji-Yu Feng ◽  
Maarten BJ Roeffaers ◽  
...  
Keyword(s):  
Thin Film ◽  
Titanium Dioxide ◽  
Surface Modification ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Photocatalytic Oxidation ◽  
Functional Materials ◽  
Atomic Layer ◽  
Oxidative Modification ◽  
Layer Deposition

Oxidative modification of graphene-based materials is an attractive route to functional materials. The use of strong oxidants to achieve surface modification of the carbon often leads to poor uniformity and...

Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al2O3 at Low Temperature

2013 ◽  
Vol 117 (39) ◽  
pp. 20308-20312 ◽  
Author(s):  
Yong-Qiang Yang ◽  
Yu Duan ◽  
Ping Chen ◽  
Feng-Bo Sun ◽  
Ya-Hui Duan ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Encapsulation

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition
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