Covalent graphite modification by low-temperature photocatalytic oxidation using titanium dioxide thin film prepared by atomic layer deposition

Catalysis Science & Technology ◽

10.1039/d1cy00941a ◽

2021 ◽

Author(s):

Niels R. Ostyn ◽

Sreeprasanth Pulinthanathu Sree ◽

Jin Li ◽

Ji-Yu Feng ◽

Maarten BJ Roeffaers ◽

...

Keyword(s):

Thin Film ◽

Titanium Dioxide ◽

Surface Modification ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Photocatalytic Oxidation ◽

Functional Materials ◽

Atomic Layer ◽

Oxidative Modification ◽

Layer Deposition

Oxidative modification of graphene-based materials is an attractive route to functional materials. The use of strong oxidants to achieve surface modification of the carbon often leads to poor uniformity and...

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Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

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36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15164 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 472-476

Author(s):

Qi Li ◽

Huijin Li ◽

Junchen Dong ◽

Jingyi Wang ◽

Dedong Han ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Zno Thin Film ◽

Layer Deposition

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The dependence of aluminum nitride thin-film microstructure on the number of low-temperature plasma-enhanced atomic layer deposition process cycles

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2019.06.064 ◽

2019 ◽

Vol 378 ◽

pp. 124744

Author(s):

M.G. Ambartsumov ◽

V.A. Tarala ◽

S.O. Krandievsky ◽

A.A. Kravtsov ◽

A.B. Sautiev ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Aluminum Nitride ◽

Atomic Layer ◽

Deposition Process ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Layer Deposition ◽

Film Microstructure

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Flexible thin film pH sensor based on low-temperature atomic layer deposition

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.201700123 ◽

2017 ◽

Vol 11 (7) ◽

pp. 1700123 ◽

Cited By ~ 6

Author(s):

Markus H. Jakob ◽

Sebastian Gutsch ◽

Claire Chatelle ◽

Abinaya Krishnaraja ◽

John Fahlteich ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Ph Sensor ◽

Atomic Layer ◽

Layer Deposition

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Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4985140 ◽

2017 ◽

Vol 35 (4) ◽

pp. 041508 ◽

Cited By ~ 10

Author(s):

Young-Soo Lee ◽

Ju-Hwan Han ◽

Jin-Seong Park ◽

Jozeph Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Thin Film Encapsulation

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Surface modification of thin film composite polyamide membrane using atomic layer deposition method

Journal of Membrane Science ◽

10.1016/j.memsci.2013.09.005 ◽

2014 ◽

Vol 450 ◽

pp. 174-180 ◽

Cited By ~ 59

Author(s):

Juha Nikkola ◽

Jenni Sievänen ◽

Mari Raulio ◽

Jing Wei ◽

Jyrki Vuorinen ◽

...

Keyword(s):

Thin Film ◽

Surface Modification ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Method ◽

Film Composite ◽

Thin Film Composite ◽

Layer Deposition ◽

Atomic Layer Deposition Method ◽

Polyamide Membrane

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Indium oxide thin film prepared by low temperature atomic layer deposition using liquid precursors and ozone oxidant

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2015.07.150 ◽

2015 ◽

Vol 649 ◽

pp. 216-221 ◽

Cited By ~ 19

Author(s):

W.J. Maeng ◽

Dong-Won Choi ◽

Jozeph Park ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Indium Oxide ◽

Atomic Layer ◽

Oxide Thin Film ◽

Liquid Precursors ◽

Layer Deposition ◽

Indium Oxide Thin Film

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Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO2-Based Thin-Film Transistor Devices

ACS Applied Materials & Interfaces ◽

10.1021/acsami.8b16443 ◽

2019 ◽

Vol 11 (3) ◽

pp. 3169-3180 ◽

Cited By ~ 11

Author(s):

Lukas Mai ◽

David Zanders ◽

Ersoy Subaşı ◽

Engin Ciftyurek ◽

Christian Hoppe ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistor ◽

Atomic Layer ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Layer Deposition

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Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al2O3 at Low Temperature

The Journal of Physical Chemistry C ◽

10.1021/jp406738h ◽

2013 ◽

Vol 117 (39) ◽

pp. 20308-20312 ◽

Cited By ~ 47

Author(s):

Yong-Qiang Yang ◽

Yu Duan ◽

Ping Chen ◽

Feng-Bo Sun ◽

Ya-Hui Duan ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Thin Film Encapsulation

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TRANSPARENT TITANIUM DIOXIDE THIN FILM DEPOSITED BY PLASMA-ENHANCED ATOMIC LAYER DEPOSITION

Integrated Ferroelectrics ◽

10.1080/10584580600660504 ◽

2006 ◽

Vol 81 (1) ◽

pp. 239-248 ◽

Cited By ~ 3

Author(s):

G. X. LIU ◽

F. K. SHAN ◽

W. J. LEE ◽

G. H. LEE ◽

I. S. KIM ◽

...

Keyword(s):

Thin Film ◽

Titanium Dioxide ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition

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