scholarly journals Precise ion energy control with tailored waveform biasing for atomic scale processing

2020 ◽  
Vol 128 (21) ◽  
pp. 213301
Author(s):  
Tahsin Faraz ◽  
Yuri G. P. Verstappen ◽  
Marcel A. Verheijen ◽  
Nicholas J. Chittock ◽  
Javier Escandon Lopez ◽  
...  
Keyword(s):  
Atomic Scale ◽  
Energy Control ◽  
Ion Energy

scholarly journals Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering

2019 ◽  
Vol 28 (11) ◽  
pp. 114001 ◽  
Author(s):  
Stefan Ries ◽  
Lars Banko ◽  
Marcus Hans ◽  
Daniel Primetzhofer ◽  
Jochen M Schneider ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Coating Properties ◽  
Energy Control ◽  
Ion Energy ◽  
Asymmetry Effect ◽  
Radio Frequency Sputtering

Effects of Ion Energy Control on Production of Nitrogen–C60Compounds by Ion Implantation

2006 ◽  
Vol 45 (10B) ◽  
pp. 8340-8343 ◽  
Author(s):  
Shigeyuki Abe ◽  
Genta Sato ◽  
Toshiro Kaneko ◽  
Takamichi Hirata ◽  
Rikizo Hatakeyama ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Energy Control ◽  
Ion Energy

Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films

2018 ◽  
Vol 660 ◽  
pp. 865-870 ◽  
Author(s):  
Shinya Iwashita ◽  
Kazuki Denpoh ◽  
Munehito Kagaya ◽  
Takamichi Kikuchi ◽  
Naotaka Noro ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Energy Control ◽  
Ion Energy ◽  
Titanium Dioxide Films ◽  
Layer Deposition

Elastic Properties of Diamond-Like Amorphous Carbon Films Grown by Computer Simulation of Ion-Beam Deposition Process

2000 ◽  
Vol 648 ◽  
Author(s):  
A.Yu. Belov ◽  
H.U. Jäger
Keyword(s):  
Amorphous Carbon ◽  
Elastic Constants ◽  
Ion Beam ◽  
Carbon Films ◽  
Atomic Scale ◽  
Ion Energy ◽  
Amorphous Carbon Films ◽  
Ion Beam Deposition ◽  
Bulk Stress ◽  
Beam Deposition

AbstractAtomic-scale calculations were performed for the first time to investigate mechanical properties of amorphous carbon films grown by a realistic simulation of ion-beam deposition. The simulated films have a thickness of a few nanometers and reproduce the main structural features of real films, with the bulk content of sp3 bonded atoms varying from 35 to 95%, depending on the ion energy (E = 20-80 eV). Employing empirical interatomic potentials for carbon, the average bulk stresses as well as the atomic-level stress distributions were calculated and analysed. The bulk stresses were found to depend not only on the ion energy, but also on the film quality, in particular, on such structural inhomogeneities as local fluctuations of the sp3 fraction with the depth. The local variation of the bulk stress from the average value considerably increases as the local content of sp2 bonded atoms increases. Elastic constants of amorphous carbon films were also computed using the method of inner elastic constants, which allows for the stress dependence of elastic constants to be analysed. The variation of Young's modulus as a function of the lateral bulk stress in an amorphous film is demonstrated.

Ion energy control in an insulating inductively coupled discharge reactor

1997 ◽  
Vol 70 (15) ◽  
pp. 1950-1952 ◽  
Author(s):  
Brian A. Smith ◽  
Lawrence J. Overzet
Keyword(s):  
Energy Control ◽  
Ion Energy ◽  
Inductively Coupled

scholarly journals Limits to ion energy control in high density glow discharges: Measurement of absolute metastable ion concentrations

1993 ◽  
Vol 73 (11) ◽  
pp. 7188-7194 ◽  
Author(s):  
Konstantinos P. Giapis ◽  
Nader Sadeghi ◽  
Joëlle Margot ◽  
Richard A. Gottscho ◽  
T. C. John Lee
Keyword(s):  
High Density ◽  
Energy Control ◽  
Ion Energy ◽  
Ion Concentrations ◽  
Glow Discharges

Electron temperature and ion energy control in modified magnetron-typed RF discharge

2001 ◽  
Vol 386 (2) ◽  
pp. 248-251 ◽  
Author(s):  
T Shimizu ◽  
K Kato ◽  
Y Li ◽  
S Iizuka ◽  
N Sato
Keyword(s):  
Electron Temperature ◽  
Rf Discharge ◽  
Energy Control ◽  
Ion Energy
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