Effects of electrode gap on radio-frequency discharge characteristics with a hollow electrode

2020 ◽  
Vol 27 (12) ◽  
pp. 123511
Author(s):  
Liuliang He ◽  
Feng He ◽  
Jiting Ouyang ◽  
Wenna Dou
Keyword(s):  
Radio Frequency ◽  
Electrode Gap ◽  
Discharge Characteristics ◽  
Hollow Electrode ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

On the Ions in an Argon-Hexamethyldisiloxane Radio-Frequency-Discharge

1994 ◽  
pp. 335-341 ◽  
Author(s):  
Rüdiger Foest ◽  
Martin Schmidt ◽  
Mario Hannemann ◽  
Ralf Basner
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharge
Sign in / Sign up

Export Citation Format

Share Document