Improve the reliability of the ion source beam extraction by adopting a solid-state suppress electron power supply
Keyword(s):
2015 ◽
Vol 10
(0)
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pp. 3405016-3405016
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Keyword(s):
Keyword(s):
2008 ◽
Vol 83
(1)
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pp. 21-29
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Keyword(s):
2012 ◽
Vol 83
(2)
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pp. 02B116
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