New etched-mirror fabrication process for aluminum gallium nitride laser diodes

Scilight ◽  
2020 ◽  
Vol 2020 (13) ◽  
pp. 131105
Author(s):  
Jodi Ackerman Frank
2014 ◽  
Vol 11 (3-4) ◽  
pp. 670-673 ◽  
Author(s):  
Katarzyna Holc ◽  
Gerrit Lükens ◽  
Thomas Weig ◽  
Klaus Köhler ◽  
Joachim Wagner ◽  
...  

2017 ◽  
Vol 56 (6) ◽  
pp. 1654 ◽  
Author(s):  
Ryota Sawada ◽  
Hiroki Tanaka ◽  
Naoto Sugiyama ◽  
Fumihiko Kannari

2019 ◽  
Vol 2019 (1) ◽  
pp. 000444-000449
Author(s):  
D. Alliata ◽  
N. Anderson ◽  
M. Durand de Gevigney ◽  
I. Bergoend ◽  
P. Gastaldo

Abstract Process control solutions to secure the High-Volume Manufacturing of Gallium Nitride (GaN) devices for power applications are a must today. Unity recently developed and introduced on the market a total control solution that address both defectivity and metrology needs of GaN industry. Proprietary technologies like Phase Shift Deflectometry, darkfield inspection, confocal chromatic imaging and infrared interferometry are here explored to detect killer defects potentially affecting the gallium nitride wafer. More in detail, we characterized Gallium nitride on Silicon substrate before and after the fabrication of the final device and demonstrated how the fabrication process can be optimized.


2012 ◽  
Vol 5 (11) ◽  
pp. 112103 ◽  
Author(s):  
Czeslaw Skierbiszewski ◽  
Marcin Siekacz ◽  
Henryk Turski ◽  
Grzegorz Muziol ◽  
Marta Sawicka ◽  
...  

2010 ◽  
Vol 22 (5) ◽  
pp. 329-331 ◽  
Author(s):  
B. Cheng ◽  
C.L. Chua ◽  
Zhihong Yang ◽  
M. Teepe ◽  
C. Knollenberg ◽  
...  

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