Rapid thermal diffusion and ohmic contacts using zinc in GaAs and GaAlAs

1987 ◽  
Vol 51 (25) ◽  
pp. 2118-2120 ◽  
Author(s):  
Sandip Tiwari ◽  
Jeffrey Hintzman ◽  
Alessandro Callegari
Keyword(s):  
Thermal Diffusion ◽  
Ohmic Contacts ◽  
Rapid Thermal Diffusion

Rapid Thermal Diffusion of Zinc In GaAs

1987 ◽  
Vol 92 ◽  
Author(s):  
T.S. Kalkur ◽  
Y.C. Lu ◽  
C.A. Paz de Araujo
Keyword(s):  
Thermal Diffusion ◽  
Ohmic Contacts ◽  
Low Voltage ◽  
Hole Concentration ◽  
Silica Film ◽  
Transmission Line Method ◽  
Van Der Pauw ◽  
Rapid Thermal Diffusion ◽  
Secondary Ion ◽  
Voltage Scanning

ABSTRACTRapid thermal diffusion of zinc into semi-insulating GaAs from spin-on zinc silica film is investigated. The rapid thermal diffusion is performed for various diffusion times (5 to 25 sec) and temperatures (800° to 950° C) with tungstenhalogen lamps as the heat source. The sheet resistivity, surface hole concentration and mobility of these zinc diffused layers as measured by Van der Pauw technique shows the formation of shallow p+ layer. The surface morphology of these diffused layers are observed in a low voltage Scanning Electron Microscope (SEM) and the depth profile of diffused impurities are determined by Secondary Ion Mass Spectroscopy (SIMS). Nonalloyed ohmic contacts are formed on these zinc diffused layers and the contact resistivity is determined by the Transmission Line Method (TLM).

SiGe Esaki tunnel diodes fabricated by UHV-CVD growth and proximity rapid thermal diffusion

2004 ◽  
Vol 40 (1) ◽  
pp. 83 ◽  
Author(s):  
L.-E. Wernersson ◽  
S. Kabeer ◽  
V. Zela ◽  
E. Lind ◽  
J. Zhang ◽  
...  
Keyword(s):  
Thermal Diffusion ◽  
Tunnel Diodes ◽  
Cvd Growth ◽  
Rapid Thermal Diffusion

Selective emitters in Si by single step rapid thermal diffusion for photovoltaic devices

2000 ◽  
Vol 21 (6) ◽  
pp. 274-276 ◽  
Author(s):  
S. Sivoththaman ◽  
W. Laureys ◽  
P. De Schepper ◽  
J. Nijs ◽  
R. Mertens
Keyword(s):  
Thermal Diffusion ◽  
Single Step ◽  
Photovoltaic Devices ◽  
Rapid Thermal Diffusion ◽  
Selective Emitters

Optical effects during rapid thermal diffusion

1998 ◽  
Vol 27 (12) ◽  
pp. 1315-1322 ◽  
Author(s):  
S. Noël ◽  
L. Ventura ◽  
A. Slaoui ◽  
J. C. Muller ◽  
B. Groh ◽  
...  
Keyword(s):  
Thermal Diffusion ◽  
Optical Effects ◽  
Rapid Thermal Diffusion

Rapid Thermal Diffusion of Indium in p-HgCdTe/CdTe

1996 ◽  
Vol 35 (Part 2, No. 12A) ◽  
pp. L1554-L1557 ◽  
Author(s):  
Seung-Man Park ◽  
Jae Mook Kim ◽  
Hee Chul Lee ◽  
Choong-Ki Kim
Keyword(s):  
Thermal Diffusion ◽  
Rapid Thermal Diffusion

Modeling Rapid Thermal Diffusion of Arsenic and Boron in Silicon

1984 ◽  
Vol 131 (10) ◽  
pp. 2387-2394 ◽  
Author(s):  
R. B. Fair ◽  
J. J. Wortman ◽  
J. Liu
Keyword(s):  
Thermal Diffusion ◽  
Rapid Thermal Diffusion
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