Amorphous carbon films as resist masks with high reactive ion etching resistance for nanometer lithography

1986 ◽  
Vol 48 (13) ◽  
pp. 835-837 ◽  
Author(s):  
Masami Kakuchi ◽  
Makoto Hikita ◽  
Toshiaki Tamamura
Keyword(s):  
Amorphous Carbon ◽  
Reactive Ion Etching ◽  
Carbon Films ◽  
Ion Etching ◽  
Amorphous Carbon Films

scholarly journals Plasma nanotexturing of amorphous carbon films by reactive ion etching

2018 ◽  
Vol 354 ◽  
pp. 153-160 ◽  
Author(s):  
Armstrong Godoy ◽  
Felipe Gondim Carlucci ◽  
Douglas Marcel Gonçalves Leite ◽  
Walter Miyakawa ◽  
André Luis Jesus Pereira ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Reactive Ion Etching ◽  
Carbon Films ◽  
Ion Etching ◽  
Amorphous Carbon Films

Scanning Tunneling Microscopy of Amorphous Carbon Films

1990 ◽  
Vol 48 (1) ◽  
pp. 318-319
Author(s):  
Mircea Fotino ◽  
D.C. Parks
Keyword(s):  
Scanning Tunneling Microscopy ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Atomic Scale ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Amorphous Carbon Films ◽  
Image Optimization ◽  
Step Procedure ◽  
Stm Images

In the last few years scanning tunneling microscopy (STM) has made it possible and easily accessible to visualize surfaces of conducting specimens at the atomic scale. Such performance allows the detailed characterization of surface morphology in an increasing spectrum of applications in a wide variety of fields. Because the basic imaging process in STM differs fundamentally from its equivalent in other well-established microscopies, good understanding of the imaging mechanism in STM enables one to grasp the correct information content in STM images. It thus appears appropriate to explore by STM the structure of amorphous carbon films because they are used in many applications, in particular in the investigation of delicate biological specimens that may be altered through the preparation procedures.All STM images in the present study were obtained with the commercial instrument Nanoscope II (Digital Instruments, Inc., Santa Barbara, California). Since the importance of the scanning tip for image optimization and artifact reduction cannot be sufficiently emphasized, as stressed by early analyses of STM image formation, great attention has been directed toward adopting the most satisfactory tip geometry. The tips used here consisted either of mechanically sheared Pt/Ir wire (90:10, 0.010" diameter) or of etched W wire (0.030" diameter). The latter were eventually preferred after a two-step procedure for etching in NaOH was found to produce routinely tips with one or more short whiskers that are essentially rigid, uniform and sharp (Fig. 1) . Under these circumstances, atomic-resolution images of cleaved highly-ordered pyro-lytic graphite (HOPG) were reproducibly and readily attained as a standard criterion for easily recognizable and satisfactory performance (Fig. 2).

Tribo-mechanical properties and biocompatibility of Ag-containing amorphous carbon films deposited onto Ti6Al4V

2021 ◽  
pp. 127384
Author(s):  
Wolfgang Tillmann ◽  
Nelson Filipe Lopes Dias ◽  
Carlo Franke ◽  
David Kokalj ◽  
Dominic Stangier ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films
Sign in / Sign up

Export Citation Format

Share Document