Plasma‐enhanced metalorganic chemical vapor deposition ofc‐axis oriented and epitaxial films of ZnO at low substrate temperatures

Tadashi Shiosaki; Takashi Yamamoto; Mitsuo Yagi; Akira Kawabata

doi:10.1063/1.92751

Plasma‐enhanced metalorganic chemical vapor deposition ofc‐axis oriented and epitaxial films of ZnO at low substrate temperatures

Applied Physics Letters ◽

10.1063/1.92751 ◽

1981 ◽

Vol 39 (5) ◽

pp. 399-401 ◽

Cited By ~ 38

Author(s):

Tadashi Shiosaki ◽

Takashi Yamamoto ◽

Mitsuo Yagi ◽

Akira Kawabata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Substrate Temperatures ◽

Metalorganic Chemical

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Plasma-Enhanced Metalorganic Chemical Vapor Deposition of C-Axis Oriented and Epitaxial Films of ZnO at Low Substrate Temperatures

10.1109/ultsym.1981.197671 ◽

1981 ◽

Author(s):

T. Shiosaki ◽

M. Shimizu ◽

T. Yamamto ◽

M. Yagi ◽

A. Kawabata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Substrate Temperatures ◽

Metalorganic Chemical

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AlN Epitaxial Films Grown by ECR Plasma Assisted Metalorganic Chemical Vapor Deposition under Controlled Plasma Condition in Afterglow Region

Materials Science Forum ◽

10.4028/www.scientific.net/msf.338-342.1511 ◽

2000 ◽

Vol 338-342 ◽

pp. 1511-1514

Author(s):

Kanji Yasui ◽

S. Hoshino ◽

Takashi Akahane

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Plasma Condition ◽

Ecr Plasma ◽

Metalorganic Chemical

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Metalorganic Chemical Vapor Deposition of over 150‐nm‐Thick Quaternary AlGaInN Epitaxial Films near Alloy Composition Lattice‐Matching to GaN on Sapphire and Their Structural and Optical Characterization

physica status solidi (a) ◽

10.1002/pssa.201900597 ◽

2019 ◽

Vol 217 (3) ◽

pp. 1900597 ◽

Cited By ~ 1

Author(s):

Makoto Miyoshi ◽

Hiroki Harada ◽

Takashi Egawa ◽

Tetsuya Takeuchi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Alloy Composition ◽

Chemical Vapor ◽

Optical Characterization ◽

Epitaxial Films ◽

Lattice Matching ◽

Metalorganic Chemical

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Optical processes in In/sub x/Ga/sub 1-x/N epitaxial films grown by metalorganic chemical vapor deposition

Semiconducting and Insulating Materials 1998. Proceedings of the 10th Conference on Semiconducting and Insulating Materials (SIMC-X) (Cat. No.98CH36159) ◽

10.1109/sim.1998.785116 ◽

2002 ◽

Author(s):

W. Shan ◽

J.W. Ager ◽

W. Walukiewicz ◽

E.E. Haller

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Metalorganic Chemical

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Effects of Substrate Temperatures and V/III Ratios on Epitaxial InP Grown by Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.23.l121 ◽

1984 ◽

Vol 23 (Part 2, No. 2) ◽

pp. L121-L123 ◽

Cited By ~ 15

Author(s):

Kunihiko Uwai ◽

Nobuhiko Susa ◽

Osamu Mikami ◽

Takashi Fukui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Substrate Temperatures ◽

Metalorganic Chemical

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Characterization of niobium-doped titania epitaxial films deposited by metalorganic chemical vapor deposition

Materials Characterization ◽

10.1016/j.matchar.2018.01.044 ◽

2018 ◽

Vol 137 ◽

pp. 263-268 ◽

Cited By ~ 4

Author(s):

Wei Zhao ◽

Caina Luan ◽

Xiaochen Ma ◽

Xianjin Feng ◽

Linan He ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Niobium Doped ◽

Doped Titania ◽

Metalorganic Chemical

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Laser‐assisted metalorganic chemical vapor deposition of zinc selenide epitaxial films

Applied Physics Letters ◽

10.1063/1.101084 ◽

1989 ◽

Vol 54 (24) ◽

pp. 2440-2442 ◽

Cited By ~ 13

Author(s):

G. B. Shinn ◽

P. M. Gillespie ◽

W. L. Wilson ◽

W. M. Duncan

Keyword(s):

Chemical Vapor Deposition ◽

Zinc Selenide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Metalorganic Chemical

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Structural and Optical Properties of ZnO Epitaxial Films Grown on Al2O3(11\bar20) Substrates by Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.4110 ◽

2004 ◽

Vol 43 (7A) ◽

pp. 4110-4113 ◽

Cited By ~ 8

Author(s):

Nguyen Thanh Binh ◽

Bao-Ping Zhang ◽

Cheng-You Liu ◽

Kazuki Wakatsuki ◽

Yusaburo Segawa ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Structural And Optical Properties ◽

Metalorganic Chemical

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Effects of growth temperature on the characteristics of ZnO epitaxial films deposited by metalorganic chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(03)01466-4 ◽

2004 ◽

Vol 449 (1-2) ◽

pp. 12-19 ◽

Cited By ~ 99

Author(s):

B.P. Zhang ◽

K. Wakatsuki ◽

N.T. Binh ◽

N. Usami ◽

Y. Segawa

Keyword(s):

Chemical Vapor Deposition ◽

Growth Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Metalorganic Chemical

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Growth behavior on V-grooved high Miller index GaAs substrates by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(94)00527-3 ◽

1995 ◽

Vol 146 (1-4) ◽

pp. 482-488 ◽

Cited By ~ 8

Author(s):

Moo-Sung Kim ◽

Yong Kim ◽

Min-Suk Lee ◽

Young Ju Park ◽

Seong-II Kim ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Growth Behavior ◽

Miller Index ◽

Gaas Substrates ◽

Metalorganic Chemical

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