Metalorganic Chemical Vapor Deposition of over 150‐nm‐Thick Quaternary AlGaInN Epitaxial Films near Alloy Composition Lattice‐Matching to GaN on Sapphire and Their Structural and Optical Characterization

2019 ◽  
Vol 217 (3) ◽  
pp. 1900597 ◽  
Author(s):  
Makoto Miyoshi ◽  
Hiroki Harada ◽  
Takashi Egawa ◽  
Tetsuya Takeuchi
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Alloy Composition ◽  
Chemical Vapor ◽  
Optical Characterization ◽  
Epitaxial Films ◽  
Lattice Matching ◽  
Metalorganic Chemical

Analysis of Vegard’s law for lattice matching InxAl1−xN to GaN by metalorganic chemical vapor deposition

2017 ◽  
Vol 475 ◽  
pp. 127-135 ◽  
Author(s):  
Humberto M. Foronda ◽  
Baishakhi Mazumder ◽  
Erin C. Young ◽  
Matthew A. Laurent ◽  
Youli Li ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Lattice Matching ◽  
Vegard’S Law ◽  
Metalorganic Chemical
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