Profile and groove‐depth control in GaAs diffraction gratings fabricated by preferential chemical etching in H2SO4‐H2O2‐H2O system
2016 ◽
Vol 1136
◽
pp. 125-130
Keyword(s):
Keyword(s):
1992 ◽
Vol 50
(2)
◽
pp. 1424-1425
1987 ◽
Vol 48
(C6)
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pp. C6-595-C6-599
2018 ◽
Vol 24
(5)
◽
pp. 21-30
2013 ◽
Vol 72
(8)
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pp. 661-671
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