Monte Carlo simulation and Navier–Stokes finite difference calculation of unsteady-state rarefied gas flows

1998 ◽  
Vol 10 (1) ◽  
pp. 289-300 ◽  
Author(s):  
Stefan Stefanov ◽  
Peter Gospodinov ◽  
Carlo Cercignani
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Finite Difference ◽  
Rarefied Gas ◽  
Navier Stokes ◽  
Gas Flows ◽  
Unsteady State ◽  
Rarefied Gas Flows ◽  
Difference Calculation

Monte Carlo Simulations of Film Profile Evolution During Nonplanar CVD Processes

1992 ◽  
Vol 280 ◽  
Author(s):  
Daniel G. Coronell ◽  
Klavs F. Jensen
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Systematic Study ◽  
Rarefied Gas ◽  
Gas Flows ◽  
Simulation Approach ◽  
Sticking Coefficient ◽  
Rarefied Gas Flows ◽  
Feature Geometry ◽  
Film Profile

ABSTRACTA Monte Carlo simulation approach has been developed to model transport and film profile evolution for rarefied gas flows during nonplanar CVD over trenches and contact holes. A systematic study of the effect of various parameters on the film conformality including intermolecular collisions, reactant sticking coefficient and feature geometry is reported.

scholarly journals Effect of viscosity on slip boundary conditions in rarefied gas flows

2019 ◽  
Author(s):  
Nam T. P. Le
Keyword(s):  
Slip Velocity ◽  
Rarefied Gas ◽  
Cross Flow ◽  
Navier Stokes ◽  
Gas Flows ◽  
Gas Temperature ◽  
Slip Boundary ◽  
Rarefied Gas Flows ◽  
Viscosity Models ◽  
Simulation Results

The viscosity of gases plays an important role in the kinetic theory of gases and in the continuum-fluid modeling of the rarefied gas flows. In this paper we investigate the effect of the gas viscosity on the surface properties as surface gas temperature and slip velocity in rarefied gas simulations. Three various viscosity models in the literature such as the Maxwell, Power Law and Sutherland models are evaluated. They are implemented into OpenFOAM to work with the solver “rhoCentralFoam” that solves the Navier-Stokes-Fourier equations. Four test cases such as the pressure driven backward facing step nanochannel, lid-driven micro-cavity, hypersonic gas flows past the sharp 25-55-deg. biconic and the circular cylinder in cross-flow cases are considered for evaluating three viscosity models. The simulation results show that, whichever the first-order or second-order slip and jump conditions are adopted, the simulation results of the surface temperature and slip velocity using the Maxwell viscosity model give good agreement with DSMC data for all cases studied.

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