Study on depth profiles of hydrogen in boron-doped diamond films by elastic recoil detection analysis

1999 ◽  
Author(s):  
Liao Changgeng ◽  
Wang Yongqiang ◽  
Yang Shengsheng ◽  
Chen Ximeng
2012 ◽  
Vol 457-458 ◽  
pp. 170-173
Author(s):  
Chao Zhuo Liu

The essential principle of elastic recoil detection analysis (ERDA) of hydrogen content in the film and the experimental method were described briefly. The energy spectrum of the recoiled hydrogen atom can be obtained by the elastic collision of incident ion beam with hydrogen atoms in film, and the spectrum can be transferred easily into hydrogen concentration and depth profile. For illustrating the application of ERDA in hydrogen storage research, a beam of helium ion was used to recoil hydrogen in titanium hydride and deuteride film to obtain hydrogen contents and depth profiles. This technique was believed to be powerful in determining hydrogen content in hydride films.


2016 ◽  
Vol 26 (1) ◽  
pp. 83 ◽  
Author(s):  
Vu Duc Phu ◽  
Le Hong Khiem ◽  
A. P. Kobzev ◽  
M. Kulik

This paper presents the results of an experimental study of three samples containing various elements in the near-surface layers. The depth profiles of all the elements of different atomic masses from hydrogen to silver were investigated by Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA). The experiments were performed by using the low-energy (about 2 MeV) 4He+ ion beams. The obtained results demonstrate the possibility of the RBS and ERDA methods in the investigation of depth profiles of any mass element with an atomic concentration of about 0.01 at.% and a depth resolution close to 10 nm.


2018 ◽  
Author(s):  
Dmitrii Moldarev ◽  
Elbruz M. Baba ◽  
Marcos V. Moro ◽  
Chang C. You ◽  
Smagul Zh. Karazhanov ◽  
...  

It has been recently demonstrated that yttrium oxyhydride(YHO) films can exhibit reversible photochromic properties when exposed to illumination at ambient conditions. This switchable optical propertyenables their utilization in many technological applications, such as smart windows, sensors, goggles, medical devices, etc. However, how the composition of the films affects their optical properties is not fully clear and therefore demands a straightforward investigation. In this work, the composition of YHO films manufactured by reactive magnetron sputtering under different conditions is deduced in a ternary diagram from Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA). The results suggest that stable compounds are formed with a specificchemical formula – YH<sub>2-δ</sub>O<sub>δ</sub>. In addition, optical and electrical properties of the films are investigated, and a correlation with their compositions is established. The corresponding photochromic response is found in a specific oxygen concentration range (0.45 < δ < 1.5) with maximum and minimum of magnitude on the lower and higher border, respectively.


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