A facile fabrication procedure for platinum nanoprobes with high-aspect-ratio and low tip radii via electrochemical etching

2020 ◽  
Vol 91 (3) ◽  
pp. 033702
Author(s):  
J. Zhang ◽  
Y. Gonzalez ◽  
R. Sany ◽  
A. Ruediger
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrochemical Etching ◽  
Fabrication Procedure ◽  
Facile Fabrication

Fabrication of ultra-high aspect ratio silicon nanopores by electrochemical etching

2014 ◽  
Vol 105 (12) ◽  
pp. 123111 ◽  
Author(s):  
Torsten Schmidt ◽  
Miao Zhang ◽  
Shun Yu ◽  
Jan Linnros
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrochemical Etching

High-aspect ratio micro- and nanostructures enabled by photo-electrochemical etching for sensing and energy harvesting applications

2018 ◽  
Vol 8 (5) ◽  
pp. 1171-1177 ◽  
Author(s):  
Badriyah Alhalaili ◽  
Daniel M. Dryden ◽  
Ruxandra Vidu ◽  
Soroush Ghandiparsi ◽  
Hilal Cansizoglu ◽  
...  
Keyword(s):  
Energy Harvesting ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrochemical Etching

Sharp Needles: Fabrication of Tungsten Nanotips by AC Electrochemical Etching and Laser Enhanced Etching for Nanoprobing on Interconnects of Advanced Technology Nodes.

2013 ◽  
Vol 1553 ◽  
Author(s):  
M. K. Dawood ◽  
Z.H. Mai ◽  
T. H. Ng ◽  
H. Tan ◽  
P.K. Tan ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Laser Irradiation ◽  
High Aspect Ratio ◽  
Electrochemical Etching ◽  
Etching Process ◽  
Advanced Technology ◽  
Radius Of Curvature ◽  
20 Nm ◽  
Technology Nodes ◽  
Contact Size

ABSTRACTSharper nanotips are required for application in nanoprobing systems due to a shrinking contact size with each new transistor technology node. We describe a two-step etching process to fabricate W nanotips with controllable tip dimensions. The first process is an optimized AC electrochemical etching in KOH to fabricate nanotips with a radius of curvature (ROC) down to 90 nm. This was followed by a secondary nanotip sharpening process by laser irradiation in KOH. High aspect ratio nanotips with ROC close to 20 nm were obtained. Finally we demonstrate the application of the fabricated nanotips for nanoprobing on advanced technology SRAM devices.

scholarly journals Excellent potential of photo-electrochemical etching for fabricating high-aspect-ratio deep trenches in gallium nitride

2018 ◽  
Vol 11 (9) ◽  
pp. 091001 ◽  
Author(s):  
Fumimasa Horikiri ◽  
Hiroshi Ohta ◽  
Naomi Asai ◽  
Yoshinobu Narita ◽  
Takehiro Yoshida ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrochemical Etching

Micro-Robotic Actuation Units Based on Thin-Film Piezoelectric and High-Aspect Ratio Polymer Structures

2014 ◽  
Author(s):  
Minchul Shin ◽  
Jongsoo Choi ◽  
Ryan Q. Rudy ◽  
Christopher Kao ◽  
Jeffrey S. Pulskamp ◽  
...  
Keyword(s):  
Thin Film ◽  
Aspect Ratio ◽  
Lead Zirconate Titanate ◽  
High Aspect Ratio ◽  
Low Voltage ◽  
Weight Bearing ◽  
Lead Zirconate ◽  
Dynamic Responses ◽  
Low Voltage Operation ◽  
Fabrication Procedure

A fabrication procedure is presented for creating microactuation elements that link piezoelectric thin-films with high-aspect ratio parylene microstructures. Resulting actuators permit relatively large rotational motions for low voltage operation, while maintaining large weight-bearing capacity. Actuator fabrication is performed on a silicon wafer though a combination of metal and thin-film lead-zirconate-titanate (PZT) deposition and patterning, parylene refill of high-aspect ratio trenches, and dry release of moving parts from the silicon substrate. Static and dynamic responses of various test structures are measured, to estimate material properties of the integrated PZT-polymer structures, for use in future actuator modeling and optimization.

Facile Fabrication of Open-Ended High Aspect-Ratio Anodic TiO2 Nanotube Films and their Applications

2012 ◽  
Vol 512-515 ◽  
pp. 1659-1662 ◽  
Author(s):  
Jian Jun Liao ◽  
Shi Wei Lin ◽  
Neng Qian Pan ◽  
Xian Kun Cao ◽  
Jian Bao Li
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Chemical Etching ◽  
Physical Separation ◽  
Photocatalytic Reactor ◽  
Facile Fabrication ◽  
Pore Opening ◽  
Flow Through ◽  
Photocatalytic Reactions ◽  
Nanotube Films

In the present work, we demonstrated a facile process to prepare an open-ended high aspect-ratio TiO2 nanotube films through separating the anodic TNT array from the Ti substrate by a small reverse bias and opening the tube bottom by a chemical etching. The possible mechanisms of film detachment and pore opening processes have been briefly discussed. Such a process allows controlling the open-ended morphology by the straightforward chemical etching, which shows great potential in many applications, such as flow-through photocatalytic reactions, biofiltration, and diffusion controlling, and so on. An example using the open-ended TNT films is finally given as a flow-through photocatalytic reactor. The photocatalytic film has been shown to have multiple functions such as physical separation of contaminants, filtration, and decomposition of organic pollutants during diffusion.

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