Development of 1.2-GHz ECR ion source and Wien filter for inexpensive ion beam processing system

2019 ◽  
Vol 90 (12) ◽  
pp. 123508
Author(s):  
Toyohisa Asaji ◽  
Hiroya Uyama ◽  
Takuro Umetsugu ◽  
Tsubasa Nakamura ◽  
Takeshi Hitobo ◽  
...  
1982 ◽  
Vol 21 (Part 2, No. 1) ◽  
pp. L4-L6 ◽  
Author(s):  
Seitaro Matsuo ◽  
Yoshio Adachi

2004 ◽  
Vol 75 (5) ◽  
pp. 1494-1496 ◽  
Author(s):  
L. Ma ◽  
M. T. Song ◽  
Z. M. Zhang ◽  
Y. Cao ◽  
X. Y. Chen

Author(s):  
Roger Alvis ◽  
Ron Kelley

Abstract A Plasma-source focused ion beam (Helios PFIB) DualBeam™ microscope with sub-nanometer 1kV SEM resolution was used to investigate the structure of a state-of-the-art organic light-emitting diode (OLED) display. The capability of the Helios PFIB to produce and manipulate millimeter-scale samples for wide field-of-view crosssectional SEM analyses was demonstrated by lifting out a 570μm long by 40μm wide x 10μm deep and mounting it on a copper half-grid. An angled face was cut into the chunk and high-resolution back-scattered SEM tiles across the entire exposed face were automatically acquired within a modular automated processing system (MAPS).


Author(s):  
Sergey Vybin ◽  
V. A. Skalyga ◽  
Ivan Izotov ◽  
Sergey Golubev ◽  
Sergey Razin ◽  
...  

Abstract The high efficiency of a new ion beam extraction system with a strongly inhomogeneous electric field has been experimentally demonstrated. Previously, this approach was proposed and analysed numerically by the authors. The experiment was carried out using a pulsed high-current electron-cyclotron resonance (ECR) ion source SMIS 37 with high frequency (37.5 GHz) and high power (100 kW) microwave plasma heating. The accelerating field strength is increased (when compared to a flat or a quasi-pierced geometry) in the plasma meniscus region due to its inhomogeneity. It allows for the increase of the ion acceleration rate and for expansion of the available range of current densities with effective ion beam formation. The experiment demonstrated the main advantages of this approach, such as: a significant decrease in the optimal accelerating voltage for certain values of current density; a possibility of ion beam formation with previously inaccessible current densities; a significant decrease in the ion flux to the puller in non-optimal modes of ion beam formation. Proton beams with a current density of up to 1.1 A cm-2 were obtained for the first time with an ECR ion source.


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