Broad Ion Beam Extraction from Large Bore ECR Ion Source with Cylindrically Comb-Shaped Magnetic Fields Configuration by Feeding Simultaneously 11 to 13 GHz and 2.45 GHz Microwaves

2008 ◽  
Author(s):  
Y. Kato ◽  
T. Satani ◽  
Y. Matsui ◽  
T. Watanabe ◽  
M. Muramatsu ◽  
...  
Keyword(s):  
Magnetic Fields ◽  
Ion Beam ◽  
Ion Source ◽  
Beam Extraction ◽  
Ecr Ion Source

Reactive Ion Beam Etching Using a Broad Beam ECR Ion Source

1982 ◽  
Vol 21 (Part 2, No. 1) ◽  
pp. L4-L6 ◽  
Author(s):  
Seitaro Matsuo ◽  
Yoshio Adachi
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Ecr Ion Source ◽  
Ion Beam Etching ◽  
Broad Beam ◽  
Reactive Ion Beam Etching

Analysis of the Effect of Beam Divergence Angle on Back-Streaming Electron Region in Ion Source for EAST-Neutral Beam Injection

2018 ◽  
Vol 4 (3) ◽  
Author(s):  
Hu Chundong ◽  
Wu Mingshan ◽  
Xie Yahong ◽  
Wei Jianglong ◽  
Yu Ling
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Neutral Beam Injection ◽  
Beam Divergence ◽  
Neutral Beam ◽  
Divergence Angle ◽  
Beam Extraction ◽  
Beam Injection ◽  
Back Plate ◽  
Beam Divergence Angle

During the process of beam extraction in positive ion source under high voltage region, a large number of electrons are produced in the gaps of grids. After back-streaming acceleration, these electrons go back to arc chamber or impinge grids and then heat back plate or grids, which are harmful for the safety of ion source. Under the situation of poor beam extraction optics, a large part of the primary beam ions bombard the surface of suppressor grid (SG). And this process produces a large number of electrons. Due to the huge extracted voltage, the secondary electron emission coefficient of the SG surface is also high. As a result, the grids' current grows. According to the measurement of the current of SG and the calculation of the perveance of the corresponding shoot, the effect of ion beam divergence angle on back-streaming electrons can be analyzed. When the beam divergence angle increases, the number of back-streaming electrons increases rapidly, and grids' current changes significantly, especially the current of gradient grid and SG. The results can guide the parameters operating on the ion source for Experimental Advanced Superconducting Tokamak-neutral beam injection (EAST-NBI) and find the reasonable operation interval of perveance and to ensure the safety and stable running of the ion source, which has great significance on the development of long pulse, high power ion source.

Ion beam extraction with ion space‐charge compensation in beam‐plasma type ion source

1982 ◽  
Vol 53 (9) ◽  
pp. 6018-6028 ◽  
Author(s):  
Junzo Ishikawa ◽  
Fumimichi Sano ◽  
Toshinori Takagi
Keyword(s):  
Space Charge ◽  
Ion Beam ◽  
Charge Compensation ◽  
Ion Source ◽  
Beam Extraction ◽  
Beam Plasma

Numerical simulation multicomponent ion beam transport from ECR ion source

2004 ◽  
Vol 75 (5) ◽  
pp. 1494-1496 ◽  
Author(s):  
L. Ma ◽  
M. T. Song ◽  
Z. M. Zhang ◽  
Y. Cao ◽  
X. Y. Chen
Keyword(s):  
Numerical Simulation ◽  
Ion Beam ◽  
Ion Source ◽  
Beam Transport ◽  
Ecr Ion Source

Uniform H[sup −] ion beam extraction in a large negative ion source with a tent-shaped magnetic filter

2008 ◽  
Vol 79 (2) ◽  
pp. 02C111 ◽  
Author(s):  
H. Tobari ◽  
M. Hanada ◽  
M. Kashiwagi ◽  
M. Taniguchi ◽  
N. Umeda ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Negative Ion ◽  
Beam Extraction ◽  
Magnetic Filter
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