Hydrogen diffusion from PECVD silicon nitride into multicrystalline silicon wafers: Elastic recoil detection analysis (ERDA) measurements and impact on light and elevated temperature induced degradation (LeTID)
1987 ◽
Vol 26
(Part 1, No. 9)
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pp. 1606-1607
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1992 ◽
Vol 68
(1-4)
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pp. 218-222
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2018 ◽
2003 ◽
Vol 206
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pp. 668-672
1998 ◽
Vol 136-138
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pp. 594-602
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Keyword(s):
2019 ◽
Vol 450
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pp. 385-389