High-density cascade arc plasma sources for application to plasma windows for virtual vacuum interfaces

2018 ◽  
Vol 25 (11) ◽  
pp. 113511 ◽  
Author(s):  
S. Namba ◽  
Y. Iwamoto ◽  
Y. Asano ◽  
T. Shugyo ◽  
K. Fukuyama ◽  
...  
Keyword(s):  
High Density ◽  
Arc Plasma ◽  
Plasma Sources ◽  
Cascade Arc

Control of high-density plasma sources for CVD and etching

Vacuum ◽  
1997 ◽  
Vol 48 (7-9) ◽  
pp. 659-664 ◽  
Author(s):  
K Suzuki ◽  
H Sugai ◽  
K Nakamura ◽  
TH Ahn ◽  
M Nagatsu
Keyword(s):  
High Density ◽  
Plasma Sources ◽  
Density Plasma

Widths and shifts of argon-II lines in a pulsed arc

1968 ◽  
Vol 46 (9) ◽  
pp. 1083-1086 ◽  
Author(s):  
A. J. Barnard ◽  
H. G. James ◽  
C. R. Neufeld
Keyword(s):  
Exposure Time ◽  
High Density ◽  
The Other ◽  
Arc Plasma ◽  
And Shifts ◽  
Pulsed Arc

The spectrum of a high-density arc plasma was photographed with a 15 μs exposure time. The widths and shifts of 17 Ar-II lines were measured. While most lines have small blue shifts, the 4104 and 4278 Å lines have substantial red shifts. These two lines are also twice as wide as the other lines.

Ion deposition in a crossed E×B field system with vacuum arc plasma sources

Vacuum ◽  
2003 ◽  
Vol 72 (3) ◽  
pp. 335-344 ◽  
Author(s):  
I. Levchenko ◽  
M. Romanov ◽  
O. Baranov ◽  
M. Keidar
Keyword(s):  
Vacuum Arc ◽  
Arc Plasma ◽  
Plasma Sources ◽  
Field System ◽  
Ion Deposition

Probe and spectroscopic measurements in a high−density dc argon arc plasma

1975 ◽  
Vol 46 (3) ◽  
pp. 1135-1140 ◽  
Author(s):  
A. W. Pasternak ◽  
A. A. Offenberger
Keyword(s):  
High Density ◽  
Arc Plasma ◽  
Spectroscopic Measurements

The application of high density plasma sources for optoelectronic devicefabrication

Vacuum ◽  
1998 ◽  
Vol 51 (4) ◽  
pp. 511-517 ◽  
Author(s):  
Bedwyr Humphreys ◽  
Matthew Govett ◽  
Andrew Goodyear
Keyword(s):  
High Density ◽  
Plasma Sources ◽  
Density Plasma
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